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Deformable Mirrors
Faculty and students at Boston University have become known for academic research on MEMS deformable mirrors, including fabrication, modeling, testing, and integration into adaptive optics systems.
The MEMS DMs employ electrostatic actuation to shape the surface of a continuous or segmented mirror,using a robust design and standard high-volume semiconductor fabrication tools.
Below are some papers that highlight work on different MEMS DM designs, and on applications of the BU DMs to various new applications.
Introduction to adaptive optics (AO) with MEMS DMs
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