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MEMS Micropumps for Cryogenic Heat Transport
In micro-satellites, a wide array of delicate instruments must be integrated into a compact and constrained space, presenting significant challenges in thermal management, particularly for active and remote cooling.
Silicon-based micropump arrays have emerged as an attractive solution due to their fabrication simplicity, minimal cryogen charge requirements, and capacity to maintain instruments within a narrow cryogenic temperature range.
The performance and longevity of these micropumps are critically dependent on two key factors: pumping capacity, which relates to diaphragm deflection, and reliability, which is governed by mechanical stress and fatigue behavior.
Both characteristics are heavily influenced by the silicon diaphragm, one of the most essential components of the system.
This research focuses on evaluating the pumping capacity and operational reliability of silicon-based micropumps under cryogenic conditions, specifically for micro-satellite applications.
Fatigue testing was performed over 1.8 million cycles without evidence of structural degradation, demonstrating the suitability of silicon as a robust and reliable material for long-duration operation in extreme cryogenic environments.
