|
Micro and nanosystems have been a remarkably active area of research in the past decade. With all the
promise shown by such systems, however, their ultimate success hinges on the development of new technologies
to meet the demands of applications. In particular, the use of intelligent materials and micro/nanofabrication
technologies will lead to greatly enhanced functionalities and capabilities of miniaturized systems for
various applications.
We perform research on MEMS (Microelectromechanical Systems) and NEMS (Nanoelectromechanical Systems).
Specifically, we are interested in applying materials science, micro/nanomechanics, and micro/nanofabrication
technologies to solve various engineering problems that are motivated by practical applications in MEMS/NEMS
and emerging nanobiotechnologies.
We enjoy exploring materials science, engineering mechanics, photonics, and manufacturing technologies at the
micro and nano scales. Motivating our efforts to advance micro and nanosystems are the real-world applications
in biomedical, energy, and defense.
Our research builds upon various disciplines: mechanical engineering, electrical engineering,
biomedical engineering, materials science, surface science, applied physics, etc. We take a quantitative
approach to designing our micro and nanosystems, using both analytical and numerical modeling to gain fundamental
understanding of the technologies that we create. We then take our designs through micro/nanofabrication to
characterization and packaging and to testing.
Current Research Topics
