>> Zhang Lab: Publications

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Archival Journal Publications
[67]. Y. Qiu, R. Liao, and X. Zhang, "Impedance-based Monitoring Ongoing Hypertrophy in Live Cardiomyocytes Induced by Tumor Necrosis Factor Alpha," Biosensors and Bioelectronics.

[66]. I-K Lin, Y-M Liao, Y. Liu, K-S Ou, K-S Chen, and X. Zhang, "Mechanical Behavior of Soft Microcantilevers-based Force Sensors," Applied Physics Letters.

[65]. X. Zheng and X. Zhang, "Cellular Force Mapping Utilizing Optical Moire," Applied Physics Letters.

[64]. H. Tao, C.M. Bingham, A.C. Strikwerda, D. Pilon, D. Shrekenhamer, N.I. Landy, K. Fan. X. Zhang, W.J. Padilla, and R.D. Averitt, "Highly-flexible Wide Angle of Incidence Terahertz Metamaterial Absorber," Physical Review B.

[63]. C.M. Bingham, H. Tao, X. Liu, R.D. Averitt, X. Zhang, and W.J. Padilla, "Planar Wallpaper Group Metamaterial for Novel Terahertz Applications," Optics Express.

[62]. N.I. Landy, H. Tao, A.C. Strikwerda, K. Fan, X. Zhang, R.D. Averitt, and W.J. Padilla, "Towards a Terahertz Metamaterial Cloak of Invisibility," New Journal of Physics.

[61]. H. Tao, A.C. Strikwerda, K. Fan, C.M. Bingham, W.J. Padilla, X. Zhang, and R.D. Averitt, "Terahertz Metamaterials on Free-standing Highly-flexible Polyimide Substrates," Journal of Physics D: Applied Physics.

[60]. H. Tao, K. Fan, A.C. Strikwerda, N.I. Landy, C.M. Bingham, W.J. Padilla, R.D. Averitt, and X. Zhang, "MEMS Enhanced Metamaterials: Towards Filling the Terahertz Gap ," Sensors and Actuators A: Physical.

[59]. H. Tao, K. Fan, A.C. Strikwerda, C.M. Bingham, W.J. Padilla, R.D. Averitt, and X. Zhang, "Development of Free Standing Terahertz Metamaterials on Highly-Flexible Polyimide Substrates: Design, Fabrication and Characterization ," Sensors and Actuators A: Physical.

[58]. Y. Qiu, R. Liao, and X. Zhang, "Impedance-based Monitoring Ongoing Apoptosis in Live Cardiomyocytes Induced by Tumor Necrosis Factor Alpha," Biophysical Journal.

[57]. X. Zheng and X. Zhang, "Optical Moire Approach based on Polymeric Periodic Substrate for Cell-Substrate Traction Force Mapping," Journal of Micromechanics and Microengineering.

[56]. I-K Lin, Y. Zhang, and X. Zhang, "Deformation of Microcantilever-Based Infrared Detector during Thermal Loading," Journal of Micromechanics and Microengineering, 18 (7) (2008) 075012. [PDF]

[55]. Y. Liu, I-K Lin, and X. Zhang, "Mechanical Properties of Sputtered Silicon Oxynitride Films by Nanoindentation," Materials Science and Engineering A, 489 (1-2) (2008) 294-301. [PDF]

[54]. S. Huang, H. Tao, I-K Lin, and X. Zhang, "Development of Double-Cantilever Infrared Detectors: Fabrication, Curvature Control and Demonstration of Thermal Detection," Sensors and Actuators A: Physical, 145-146 (2008) 231-240. [PDF]

[53]. H. Tao, N.I. Landy, C.M. Bingham, X. Zhang, R.D. Averitt, and W.J. Padilla, "A Metamaterial Absorber for the Terahertz Regime: Design, Fabrication and Characterization," Optics Express, 16 (10) (2008) 7181-7188. [PDF]

Featured by Nature (Vol. 453, 12 June 2008) [PDF], and Science (Vol. 320, 6 June 2008). [PDF]

[52]. Y. Qiu, R. Liao, and X. Zhang, "Real-Time Monitoring Primary Cardiomyocyte Adhesion Based on Electrochemical Impedance Spectroscopy and Electrical Cell-Substrate Impedance Sensing ," Analytical Chemistry, 80 (4) (2008) 990-996. [PDF]

[51]. Z. Cao and X. Zhang, "Nanoindentation Stress-Strain Curves of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films," Thin Solid Films, 516 (8) (2008) 1941-1951. [PDF]

[50]. Y. Zhao and X. Zhang, "Profile Control in Silicon Nanostructures Using Fluorine Enhanced Oxide Passivation," IEEE Transactions on Nanotechnology, 7 (1) (2008) 40-47. [PDF]

[49]. Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang, "Simultaneous Orientation and Cellular Force Measurements in Adult Cardiac Myocytes Using Three-Dimensional Polymeric Microstructures," Cell Motility and Cytoskeleton, 64 (9) (2007) 718-725. [PDF]

[48]. S. Huang and X. Zhang, "Study of Gradient Stress in Bimaterial Cantilever Structures for Infrared Applications," Journal of Micromechanics and Microengineering, 17 (7) (2007) 1211-1219. [PDF]

[47]. M. Yang and X. Zhang, "A Novel Impedance Assay for Cardiac Myocyte Hypertrophy Sensing," Sensors and Actuators A: Physical, 136 (2) (2007) 504-509. [PDF]

[46]. Y. Zhao and X. Zhang, "Adaptation of Myofibrils to a Microstructured Polymeric Substrate," Sensors and Actuators A: Physical, 136 (2) (2007) 491-495. [PDF]

[45]. M. Yang and X. Zhang, "Electrical Assisted Patterning of Cardiac Myocytes with Controlled Macroscopic Anisotropy using a Microfluidic Dielectrophoresis Chip," Sensors and Actuators A: Physical, 135 (1) (2007) 73-79. [PDF]

[44]. S. Huang and X. Zhang, "Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures," Sensors and Actuators A: Physical, 134 (1) (2007) 177-185. [PDF]

[43]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "A Novel Microfluidic Impedance Assay for Monitoring Endothelin-Induced Cardiomyocyte Hypertrophy," Biosensors and Bioelectronics, 22 (8) (2007) 1688-1693. [PDF]

[42]. Z. Cao and X. Zhang, "Nanoindentation Creep of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films," Scripta Materialia, 56 (3) (2007) 249-252. [PDF]

[41]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "Oriented and Vectorial Patterning of Cardiac Myocytes using a Microfluidic Dielectrophoresis Chip - towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy," Journal of Microelectromechanical Systems, 15 (6) (2006) 1483-1491. [PDF]

[40]. Z. Cao and X. Zhang, "Size-dependent Creep Behavior of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," Journal of Physics D: Applied Physics, 39 (23) (2006) 5054-5063. [PDF]

[39]. Y. Zhao and X. Zhang, "Determination of the Deformations in Polymeric Nanostructures Using Geometric Moire Techniques for Biological Applications," Sensors and Actuators B: Chemical, 117 (2) (2006) 376-383. [PDF]

[38]. S. Huang, B. Li, and X. Zhang, "Elimination of Stress-induced Curvature in Microcantilever Infrared Focal Plane Arrays," Sensors and Actuators A: Physical, 130-131 (2006) 331-339. [PDF]

[37]. Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang, "Microchip for Subcellular Mechanics Study in Living Cells," Sensors and Actuators B: Chemical, 114 (2) (2006) 1108-1115. [PDF]

[36]. Y. Zhao and X. Zhang, "An Approach for Creating Polymeric Microstructures with Various Aspect Ratios for Cellular Analysis Applications," Sensors and Actuators A: Physical, 127 (2) (2006) 216-220. [PDF]

[35]. H. Yu, O. Balogun, B. Li, T.W. Murray, and X. Zhang, "Fabrication of Three-Dimensional Microstructures based on Singled-layered SU-8 for Lab-on-Chip Applications," Sensors and Actuators A: Physical, 127 (2) (2006) 228-234. [PDF]

[34]. Z. Cao and X. Zhang, "Experiments and Theory of Thermally-Induced Stress Relaxation in Amorphous Dielectric Films for MEMS and IC Applications," Sensors and Actuators A: Physical, 127 (2) (2006) 221-227. [PDF]

[33]. S. Huang and X. Zhang, "Extension of the Stoney Formula for Film-Substrate Systems with Gradient Stress for MEMS Applications," Journal of Micromechanics and Microengineering, 16 (2) (2006) 382-389. [PDF]

[32]. Y. Zhao and X. Zhang, "Cellular Mechanics Study in Cardiac Myocytes Using PDMS Pillars Array," Sensors and Actuators A: Physical, 125 (2) (2006) 398-404. [PDF]

[31]. H. Yu, B. Li, and X. Zhang, "Flexible Fabrication of Three-dimensional Multi-Layered Microstructures Using a Scanning Laser System," Sensors and Actuators A: Physical, 125 (2) (2006) 553-564. [PDF]

[30]. Y. Zhao and X. Zhang, "Adaptation of Flexible Polymer Fabrication to Cellular Mechanics Study," Applied Physics Letters, 87 (14) (2005) 144101. [PDF]

Selected for Virtual Journal of Biological Physics Research in Vol. 10, Issue 7, October 2005. (http://www.vjbio.org)

[29]. Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang, "Cellular Force Measurements Using Single-Spaced Polymeric Microstructures: Isolating Cells from Base Substrate," Journal of Micromechanics and Microengineering, 15 (9) (2005) 1649-1656. [PDF]

[28]. Z. Cao, T-Y Zhang, and X. Zhang, "Microbridge Testing of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films on Silicon Wafers," Journal of Applied Physics, 97 (10) (2005) 104909(1-9). [PDF]

Selected for Virtual Journal of Nanoscale Science and Technology in Vol. 11, Issue 19, May 2005. (www.vjnano.org)

[27]. L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, and A.H. Epstein, "High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings," Journal of Microelectromechanical Systems, 14 (1) (2005) 141-152. [PDF]

[26]. H. Yu, O. Balogun, B. Li, T.W. Murray, and X. Zhang, "Building Embedded Microchannels Using a Single Layered SU-8, and Determining Young's Modulus Using a Laser Acoustic Technique," Journal of Micromechanics and Microengineering, 14 (11) (2004) 1576-1584. [PDF]

[25]. X. Zhang, Y. Zhao, B. Li, and D. Ludlow, "Pumping Capacity and Reliability of Cryogenic Micro-pump for Micro Satellite Applications," Journal of Micromechanics and Microengineering, 14 (10) (2004) 1421-1429. [PDF]

[24]. Z. Cao and X. Zhang, "Density Change and Viscous Flow during Structural Relaxation of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," Journal of Applied Physics, 96 (8) (2004) 4273-4279. [PDF]

[23]. B. Li, H. Yu, A. Sharon, and X. Zhang, "Rapid Three Dimensional Manufacturing of Microfluidic Structures Using a Scanning Laser System," Applied Physics Letters, 85 (12) (2004) 2426-2428. [PDF]

Selected for Virtual Journal of Nanoscale Science and Technology in Vol. 10, Issue 15, October 2004. (www.vjnano.org)

[22]. C.W. Wong, X. Zhang, S.A. Jacobson, and A.H. Epstein, "A Self-Acting Gas Thrust Bearing for High-Speed Microrotors," Journal of Microelectromechanical Systems, 13 (2) (2004) 158-164. [PDF]

[21]. B. Li, X. Tang, H. Xie, and X. Zhang, "Strain Analysis in MEMS/NEMS Structures and Devices by Focused Ion Beam System," Sensors and Actuators A: Physical, 111 (1) (2004) 57-62. [PDF]

[20]. C.M. Spadaccini, A. Mehra, J. Lee, X. Zhang, S. Lukachko, and I.A. Waitz, "High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines," ASME Journal of Engineering for Gas Turbines and Power, 125 (3) (2003) 709-719. [PDF]

[19]. K-S Chen, X. Zhang, and S-Y Lin, "Intrinsic Stress Generation and Relaxation of Plasma-Enhanced Chemical Vapor Deposited Oxide during Deposition and Subsequent Thermal Cycling," Thin Solid Films, 434 (1-2) (2003) 190-202. [PDF]

[18]. N. Miki, C.J. Teo, L. Ho, and X. Zhang, "Enhancement of Rotordynamic Performance of High-Speed Micro-Rotors for Power MEMS Applications by Precision Deep Reactive Ion Etching," Sensors and Actuators A: Physical, 104 (3) (2003) 263-267. [PDF]

[17]. X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz, "Igniters and Temperature Sensors for a Micro-Scale Combustion System," Sensors and Actuators A: Physical, 103 (1-2) (2003) 253-262. [PDF]

[16]. X. Zhang, K-S Chen, and S.M. Spearing, "Thermal-Mechanical Behavior of Thick PECVD Oxide Films for Power MEMS Applications," Sensors and Actuators A: Physical, 103 (1-2) (2003) 263-270. [PDF]

[15]. N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, and S.M. Spearing, "Multi-Stack Silicon-Direct Wafer Bonding for 3D MEMS Manufacturing," Sensors and Actuators A: Physical, 103 (1-2) (2003) 194-201. [PDF]

[14]. A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing, "Characterization of Silicon Wafer Bonding for Power MEMS Applications," Sensors and Actuators A: Physical, 103 (1-2) (2003) 1-8. [PDF]

[13]. C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, and I.A. Waitz, "Preliminary Development of Hydrocarbon-Fueled Catalytic Micro-Combustor," Sensors and Actuators A: Physical, 103 (1-2) (2003) 219-224. [PDF]

[12]. K-S Chen, A.A. Ayon, X. Zhang, and S.M. Spearing, "Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures after Deep Reactive Ion Etching (DRIE)," Journal of Microelectromechanical Systems, 11 (3) (2002) 264-275. [PDF]

[11]. A.A. Ayon, X. Zhang, and R. Khanna, "Anisotropic Silicon Trenches 300 um to 500 um Deep Employing Time Multiplexed Deep Etching (TMDE)," Sensors and Actuators A: Physical, 91 (3) (2001) 381-385. [PDF]

[10]. X. Zhang, K-S Chen, R. Ghodssi, A.A. Ayon, and S.M. Spearing, "Residual Stress and Fracture in Thick Tetraethylorthosilicate (TEOS) and Silane-Based PECVD Oxide Films," Sensors and Actuators A: Physical, 91 (3) (2001) 373-380. [PDF]

[9]. A. Mehra, X. Zhang, A.A. Ayon, I.A. Waitz, M.A. Schmidt, and C.M. Spadaccini, "A Six-Wafer Combustion System for a Silicon Micro Gas Turbine Engine," Journal of Microelectromechanical Systems, 9 (4) (2000) 517-527. [PDF]

[8]. A. Mehra, X. Zhang, A.A. Ayon, I.A. Waitz, and M.A. Schmidt, "Through-Wafer Electrical Interconnect for Multilevel Microelectromechanical System Devices," Journal of Vacuum Science & Technology B, 18 (5) (2000), 2583-2589. [PDF]

Selected for Virtual Journal of Nanoscale Science and Technology in Vol. 2, Issue 17, October 2000. (www.vjnano.org)

[7]. L-Q Chen, X. Zhang, T-Y Zhang, H.Y. Lin, and S.B. Lee, "Micro-Raman Analysis of Subsurface Damage Layer in Machined Silicon Wafers," Journal of Materials Research, 15 (7) (2000) 1441-1444. [PDF]

[6]. X. Zhang, T-Y Zhang, M. Wong, and Y. Zohar, "Rapid Thermal Annealing of Polysilicon Thin Films," Journal of Microelectromechanical Systems, 7 (4) (1998) 356-364. [PDF]

[5]. X. Zhang, T-Y Zhang, and Y. Zohar, "Measurements of Residual Stresses in Thin Films Using Micro-Rotating-Structures," Thin Solid Films, 335 (1-2) (1998) 97-105. [PDF]

[4]. T-Y Zhang, X. Zhang, and Y. Zohar, "Buckling of Polysilicon Microbeams during Sacrificial Layer Removal," Journal of Micromechanics and Microengineering, 8 (3) (1998) 243-249. [PDF]

[3]. X. Zhang, T-Y Zhang, M. Wong, and Y. Zohar, "Residual-Stress Relaxation in Polysilicon Thin Films by High-Temperature Rapid Thermal Annealing," Sensors and Actuators A: Physical, 64 (1) (1998) 109-115. [PDF]

[2]. G.L. Chen, X.T. Wang, K.Q. Ni, S.M. Hao, J.X. Cao, J.J. Ding, and X. Zhang, "Investigation on the 1000, 1150 and 1400C Isothermal Section of the Ti-Al-Nb System," Intermetallics, 4 (1) (1996) 13-22. [PDF]

[1]. S.M. Hao and X. Zhang, "Calculation of Phase Equilibria for the Ternary System by the Grand Potential Method," Journal of Phase Equilibria, 16 (5) (1995) 441-446. [PDF]

Conference Proceeding Papers and Abstract Referred Conference Presentations
[163]. H. Tao, N.I. Landy, K. Fan, A. Strikwerda, W.J. Padilla, R.D. Averitt , and X. Zhang, "Flexible Terahertz Metamaterials: Towards a Terahertz Metamaterial Invisible Cloak," Proceeding of 2008 International Electron Devices Meeting (IEDM '08), San Francisco, CA, USA, December 15-17, 2008, in press.

[162]. I-K Lin, W. Li, Y. Liu, H. Lu, and X. Zhang, "Thermomechanical Evolution of Al/SiNx Bimaterial Microcantilevers," 2008 Materials Research Society Fall Meeting, Boston, MA, December 1-5, 2008.

[161]. I-K Lin, W. Li, Y. Liu, H. Lu, and X. Zhang, "Viscoelastic Characterization of PDMS Film and Micropillar Arrays for Cellular Force Measurement," 2008 Materials Research Society Fall Meeting, Boston, MA, December 1-5, 2008.

[160]. H. Tao, K. Fan, A. Strikwerda, W. Padilla, R. Averitt , and X. Zhang, "Filling Terahertz Gap: Development of MEMS-based Active Metamaterial Structures and Devices at Terahertz Frequencies," 2008 Materials Research Society Fall Meeting, Boston, MA, December 1-5, 2008.

[159]. P. Du, X. Lin, and X. Zhang, "Development Of Conductive Polymer Single Layer Cantilever For Conductivity Measurement," 2008 Materials Research Society Fall Meeting, Boston, MA, December 1-5, 2008.

[158]. Y. Qiu, R. Liao, and X. Zhang, "Impedance-sensing Assay for Early Detection and Recovery of Cardiomyocyte Apoptosis," 2008 Materials Research Society Fall Meeting, Boston, MA, December 1-5, 2008.

[157]. Y. Qiu, R. Liao, and X. Zhang, "A Cardiomyocyte-based Biosensor for the Study on Hypertrophy Induced by Tumor Necrosis Factor Alpha," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[156]. X. Zheng and X. Zhang, "Mapping and Decoupling Distortions in Polymeric Periodic Substrates for Biological Applications," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[155]. I-K Lin, Y-M Liao, Y. Liu, K-S Ou, K-S Chen, and X. Zhang, "Elastic and Viscoelastic Characterization and Modeling of Polymer based Structures for Biogical Applications," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[154]. X. Zheng and X. Zhang, "Contrast Enhancement of Cell Traction Force Probing by Capping the Tips with Gold Particles," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[153]. I-K Lin, B. Hansen, Y. Liu, H. Lu, and X. Zhang, "Viscoelastic Characterization of PDMS Film and Micropillar Arrays for Cellular Force Measurement," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[152]. P. Du, X. Zhang, and X. Lin, "Conductive Polymer based Actuators," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[151]. I-K Lin, Y. Zhang, and X. Zhang, "Study of Thermomechanical Evolution of Bimaterial Microcantilever Structures for Infrared Applications," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[150]. B. Kaanta, H. Chen, and X. Zhang, "Harsh Environment Thermal Conductivity Detector," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[149]. I-K Lin, K. Fan, S. Huang, A. Gonzalez, Y. Zhang, and X. Zhang, "Characterization of Gradient Residual Stress Evolution in Bimaterial Microcantilever Structures during Thermal Cycling," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[148]. H. Tao, K. Fan, C. Bingham, W. Padilla, R. Averitt, and X. Zhang, "Design and Frication of Flexible Electrically Resonant Terahetz Metamaterials," ASME International Mechanical Engineering Congress and Exposition (ASME '08), Boston, MA, October 31 - November 6, 2008.

[147]. Y. Qiu, R. Liao, and X. Zhang, "Electrical Assay for Real-time Monitoring Cardiomyocyte Apoptosis," AVS 55th International Symposium & Exhibition (AVS '08), Boston, MA, USA, October 19-24, 2008.

[146]. X. Zheng and X. Zhang, "Mapping Smooth Muscle Cell Contractile State Regulated by Contractile Proteins using a Novel BioMEMS Moire Mapping Sensor," AVS 55th International Symposium & Exhibition (AVS '08), Boston, MA, USA, October 19-24, 2008.

[145]. X. Zheng and X. Zhang, "Diffraction Moire: Decoupling Distortions in Periodic Polymeric Post Arrays," Proceeding of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '08), San Diego, CA, USA, October 12-16, 2008, in press.

[144]. X. Zheng and X. Zhang, "A Novel Versatile Biomechano-sensor for Real Time Vascular Cell Contractility Mapping," Proceeding of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '08), San Diego, CA, USA, October 12-16, 2008, in press.

[143]. I-K Lin, Y-M Liao, K-S Chen, and X. Zhang, "Viscoelastic Characterization of Soft Micropillars for Cellular Mechanics Study," Proceeding of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '08), San Diego, CA, USA, October 12-16, 2008, in press.

[142]. Y. Qiu, R. Liao, and X. Zhang, "A Cardiomyocyte-based Biosensor for the Study on Hypertrophy Induced by Tumor Necrosis Factor Alfa," Proceeding of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '08), San Diego, CA, USA, October 12-16, 2008, in press.

[141]. Y. Qiu, R. Liao, and X. Zhang, "Impedance-Sensing Assay for Real-time Monitoring Ongoing Cardiomyocyte Apoptosis," Proceeding of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '08), San Diego, CA, USA, October 12-16, 2008, in press.

[140]. Y. Qiu, R. Liao, and X. Zhang, "Impedance-based Monitoring Ongoing Apoptosis in Live Cardiomyocytes Induced by Tumor Necrosis Factor Alpha," BMES Annual Fall Meeting (BMES '08), St. Louis, MO, USA, October 1-4, 2008.

[139]. X. Zhang, "Thermo- and Electromechanics of Multilayer Thin-Film Microstructures for MEMS Applications," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '08), Arlington, VA, USA, August 18-20, 2008.

[138]. I-Kuan Lin, H. Lu, and X. Zhang, "Viscoelastic Characterization and Modeling of Soft Micropillars as Force Transducer," Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior, Waterville, ME, July 27- August 1, 2008.

[137]. H. Tao, A. Strikwerda, C. Bingham, W.J. Padilla, X. Zhang, and R.D. Averitt, "Dynamical Control of Terahertz Metamaterial Resonance Response Using Bimaterial Cantilevers," Progress In Electromagnetics Research Symposium (PIERS '08), Cambridge, MA, USA, July 2-6, 2008.

[136]. P. Du, X. Lin, and X. Zhang, "Development of Conductive Polymer Single Layer Cantilever for Conductivity Measurement," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '08), Open Poster, Hilton Head Island, SC, USA, June 1-5, 2008.

[135]. I-K Lin and X. Zhang, "Viscoelastic Characterization of Soft Micropillars as Force Sensor for Biological Applications," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '08), Open Poster, Hilton Head Island, SC, USA, June 1-5, 2008.

[134]. X. Zheng and X. Zhang, "Moire Based Vascular Cell Contractility Sensing Chip: Magnification Effect of Moire Patterns," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '08), Open Poster, Hilton Head Island, SC, USA, June 1-5, 2008.

[133]. Y. Qiu and X. Zhang, "Impedance Assay for Real-time Monitoring Ongoing Processes of Primary Cardiomyocytes," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '08), Open Poster, Hilton Head Island, SC, USA, June 1-5, 2008.

[132]. H. Tao, C. Bingham, A. Strikwerda1, K. Fan, W.J. Padilla, R.D. Averitt,and X. Zhang, " MEMS and Metamaterials: A Perfect Marriage at Terahertz Frequencies," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '08), Hilton Head Island, SC, USA, June 1-5, 2008, pp. 54-55.

[131]. X. Zhang, "Spying on Cells: Cellular and Subcellular Analysis using Novel Polymeric Micro- and Nanostructures," US-Korea Forum on Nanotechnology, Jeju Island, Korea, April 17-18, 2008.

[130]. X. Zhang, "Cellular Mechanical Force Measurements Using Novel Polymeric Micro- and Nanosystems," NSF Workshop on Bio-Nano Manufacturing Grand Challenges for 2020, Arlington, VA, USA, April 14-16, 2008.

[129]. Y. Zhang, J. Wong, and X. Zhang, "A Multi-Scale Approach to Understanding the Mechanical and Biochemical Behavior of Tissue Engineered Blood Vessels," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '08), Knoxville, TN, USA, January 7-10, 2008.

[128]. X. Zhang, "Mechanical Behavior of Amorphous Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films for MEMS Applications," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '08), Knoxville, TN, USA, January 7-10, 2008.

[127]. X. Zhang, "A Digital Bio/Nanoelectronics Interface for Single Cell Study," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '08), Knoxville, TN, USA, January 7-10, 2008.

[126]. X. Zhang, "Creating Micro/Nano Fabricated Structures for Cellular Mechanical Force Measurements in Living Cells," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '08), Knoxville, TN, USA, January 7-10, 2008.

[125]. X. Zhang, "Small-Scale Materials and Engineering Mechanics for Next-Generation Micro/Nanosystems," DARPA/MTO Workshop on Materials and Technologies for 21st Century MEMS and NEMS, Miami, FL, USA, January 8, 2008.

[124]. X. Zheng and X. Zhang, "A Double Layered Polymer Structure for Quantifying Local Distortions on Polymer Micro/nano Structures," Materials Research Society Fall Meeting, Boston, MA, USA, November 26-30, 2007.

[123]. H. Tao and X. Zhang, "In situ Curvature Control of Microcantilever Based Capacitive Infrared Detector Focal Plane Arrays Using Electrostatic Forces," Materials Research Society Fall Meeting, Boston, MA, USA, November 26-30, 2007.

[122]. Y. Liu, I-K Lin, and X. Zhang, "Mechanical Properties of Sputtered Silicon Oxynitride Films by Nanoindentation," Fundamentals of Nanoindentation and Nanotribology IV, Mater. Res. Soc. Symp., 1049 (2007) 1049-AA05-17.

[121]. I-K Lin, Y-M Liao, K-S Chen, and X. Zhang, "Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics Applications," Microelectromechanical Systems-Materials and Devices, Mater. Res. Soc. Symp., 1052 (2007) 1052-DD03-02.

[120]. I-K Lin, Y. Zhang, and X. Zhang, "Curvature Control of Microcantilever Based Infrared Detectors Using Thermal Loading Method," Materials Research Society Fall Meeting, Boston, MA, USA, November 26-30, 2007.

[119]. X. Zheng and X. Zhang, "A Diffraction Moire Based Micro Double Layered Chip for Cellular Mechanics Study," Proceeding of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '07), Paris, France, October 7-11, 2007, pp. 1649-1651.

[118]. Y. Qiu, R. Liao, and X. Zhang, "EIS-Assisted Impedance Assay for in situ Monitoring Cardiomyocyte Apoptosis," Proceeding of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '07), Paris, France, October 7-11, 2007, pp. 128-130.

[117]. Y. Qiu, R. Liao, and X. Zhang, "Electrochemical- Impedance-Spectroscopy-Assisted In-Situ Monitoring Cardiomyocyte Adhesion to ECM," BMES Annual Fall Meeting (BMES '07), Los Angeles, CA, USA, September 26-29, 2007.

[116]. X. Zheng and X. Zhang, "Contouring Cellular Force Distribution by Moire Interferometer," BMES Annual Fall Meeting (BMES '07), Los Angeles, CA, USA, September 26-29, 2007.

[115]. X. Zhang, "Thermo- and Electromechanics of Multilayer Thin-Film Microstructures for MEMS Applications," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '07), Monterey, CA, USA, June 25-28, 2007.

[114]. X. Zheng and X. Zhang, "A MEMS based Optical Moire Approach for in situ Cardiac Myocyte Force Probing," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 1119-1122.

[113]. Y. Qiu, R. Liao, and X. Zhang, "Electrochemical Impedance Spectroscopy of the Cardiomyocyte Adhesion to Extracellular Matrix on Micro-Fabricated Biosensors," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 827-830.

[112]. S. Huang, I-K Lin, H. Tao, and X. Zhang, "Double-Cantilever Micro Infrared Detector: Fabrication, Post-Process Curvature Modification and Thermal Response Characterization," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 1601-1604.

[111]. Z. Cao and X. Zhang, "Measurement of Stress-Strain Curves of PECVD Silicon Oxide Thin Films by Means of Nanoindentation," Processing-Structure-Mechanical Property Relations in Composite Materials, Mater. Res. Soc. Symp. Proc., 977E (2007) 0977-FF04-23.

[110]. S. Huang and X. Zhang, "Development of Double-Cantilever Infrared Focal Plane Arrays: Fabrication and Post-Process Curvature Modification," Integrated Nanosensors, Mater. Res. Soc. Symp. Proc., 952E (2007) 0952-F10-03.

[109]. Y. Zhao and X. Zhang, "Mechanical Properties Evolution of Polydimethylsiloxane during Crosslinking Process," Mechanics of Biological and Bio-Inspired Materials, Mater. Res. Soc. Symp. Proc., 975E (2007) 0975-DD06-07.

[108]. Y. Zhao and X. Zhang, "Failure Investigation of Polymer Mechanical Components," Mechanics of Biological and Bio-Inspired Materials, Mater. Res. Soc. Symp. Proc., 975E (2007) 0975-DD06-09.

[107]. Z. Cao and X. Zhang, "Size Effects in Nanoindentation Creep of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," Materials Research Society Fall Meeting, Boston, MA, USA, November 27 - December 1, 2006.

[106]. Y. Qiu, R. Liao, and X. Zhang, "The Rolling Motion of Cardiomyocytes on a Dielectrophoresis Chip," Proceeding of the 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '06), Tokyo, Japan, November 5-9, 2006, pp. 1301-1303.

[105]. M. Yang and X. Zhang, "Microfluidic Impedance Assay for Monitoring Endothelin Induced Cardiomyocyte Hypertrophy," Proceeding of the 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '06), Tokyo, Japan, November 5-9, 2006, pp. 1301-1303.

[104]. Y. Zhao, D. Mabius, J. Regis, and X. Zhang, "Pressure-Assisted Micropatterning of Non-Photodefinable Polymers," Proceeding of the 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '06), Tokyo, Japan, November 5-9, 2006, pp. 164-166.

[103]. Y. Zhao, X. Zheng, J. Regis, D. Mabius, and X. Zhang, "Creating Silicon Nanostructures with Controllable Sidewall Profiles by Using Fluorine-Enhanced Oxide Passivation," Proceeding of the 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '06), Tokyo, Japan, November 5-9, 2006, pp. 167-169.

[102]. X. Zheng, Y. Zhao, and X. Zhang, "Determination of Residual Deformation of Polymeric Nanostructures using Microscopic Moire Interferometry," Optics East 2006, Boston, MA, USA, October 1-4, 2006.

[101]. S. Huang and X. Zhang, "Characterization of Gradient Residual Stress for Curvature Improvement of MEMS-Based Infrared Detector Structures," Optics East 2006, Boston, MA, USA, October 1-4, 2006.

[100]. X. Zhang, "Residual Stress and Fracture of Power MEMS Structures and Devices," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '06), Seattle, WA, USA, August 28-30, 2006.

[99]. Z. Cao and X. Zhang, "Size-Effects in Nanoindentation Creep of Plasma-Enhanced Chemical Vapor Deposited Solicon Oxide Films," Thin Film & Small Scale Mechanical Behavior, Gordon Research Conference, Waterville, ME, USA, July 30 - August 4, 2006.

[98]. X. Zhang, "Creating Micro/Nano Fabricated Structures for Cellular Mechanical Force Measurements in Living Cells," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '06), St. Louis, MI, USA, July 24-27, 2006.

[97]. Y. Zhao and X. Zhang, "Lab-on-a-Chip Polymer Microsystem for Simultaneous Cell Alignment and Cellular Force Measurement in Cardiac Myocytes," Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT '06), Singapore, June 25-28, 2006.

[96]. M. Yang and X. Zhang, "Impedance Based Biosensor with Dielectrophoresis Concentration for Cardiomyocyte Hypertrophy Sensing," Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT '06), Singapore, June 25-28, 2006.

[95]. Y. Zhao and X. Zhang, "Directional Reassembly of Myofibrils in Cultured Cardiac Myocytes Using a Three-Dimensional Polymeric Substrate," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Hilton Head Island, SC, USA, June 4-8, 2006, pp. 410-411.

[94]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "Impedance Based Biosensor with Dielectrophoresis Concentration for Cardiac Myocyte Hypertrophy Sensing," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Hilton Head Island, SC, USA, June 4-8, 2006, pp. 177-180.

[93]. M. Yang and X. Zhang, "Oriented and Vectorial Patterning of Cardiomyocytes Using a Microfluidic Dielectrophoresis Chip - towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Open Poster, Hilton Head Island, SC, USA, June 4-8, 2006.

[92]. S. Huang and X. Zhang, "Theory and Experiments for Gradient Residual Stress in MEMS-Based Infrared Detector Structures," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Open Poster, Hilton Head Island, SC, USA, June 4-8, 2006.

[91]. Z. Cao and X. Zhang, "Length-Scale Effect on Nanoindentation Creep in Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Open Poster, Hilton Head Island, SC, USA, June 4-8, 2006.

[90]. Y. Zhao and X. Zhang, "In-Plane Strain Determination in Nanoscale Cantilivers Using Scanning Moire Interferometry," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '06), Open Poster, Hilton Head Island, SC, USA, June 4-8, 2006.

[89]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "Oriented and Vectorial Patterning of Cardiac Myocyte Using a Microfluidic Dielectrophoresis Chip - towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy," Proceeding of the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '06), Istanbul, Turkey, January 22-26, 2006, pp. 8-11.>

[88]. Y. Zhao and X. Zhang, "Creating Nanostructures with Controllable Sidewall Profile for Mechanical Sensor Applications," Nanoparticles and Nanostructures in Sensors and Catalysis, Mater. Res. Soc. Symp. Proc., 900E (2006) 0900-O12-07.

[87]. Y. Zhao and X. Zhang, "Engineering Polymeric Microstructures for Cell Alignment and Force Measurement," Materials Research Society Fall Meeting, Boston, MA, USA, November 28 - December 2, 2005.

[86]. S. Huang and X. Zhang, "Application of Polyimide Sacrificial Layers for the Manufacturing of Uncooled Double-Cantilever Microbolometers," Surface Engineering for Manufacturing Applications, Mater. Res. Soc. Symp. Proc., 890 (2006) 0890-Y08-15.

[85]. Z. Cao and X. Zhang, "Influence of Size Effect on Strain Rate Sensitivity and Creep in Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," Mechanisms of Mechanical Deformation in Brittle Materials, Mater. Res. Soc. Symp. Proc., 904E (2006) 0904-BB04-21.

[84]. M. Yang and X. Zhang, "Oriented and Vectorial Patterning of Cardiac Myocytes using Microelectrodes - towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotrophy," Materials Research Society Fall Meeting, Boston, MA, USA, November 28 - December 2, 2005.

[83]. Y. Zhao and X. Zhang, "Cellular Mechanics Study using Microstructured Polymeric Substrate," ASME International Mechanical Engineering Congress and Exposition (ASME '05), Orlando, FL, USA, November 5-11, 2005.

[82]. S. Huang and X. Zhang, "An Analysis of Elastic Deformation Induced by Gradient Residual Stresses in Multilayered Structures," Proceeding of the 2005 ASME International Mechanical Engineering Congress and Exposition (ASME '05), Orlando, FL, USA, November 5-11, 2005, IMECE2005-81383.

[81]. Z. Cao, T-Y Zhang, and X. Zhang, "A Nanoindentation-Based Microbridge Testing Method for Mechanical Characterization of Thin Films for MEMS Applications," Proceeding of the 2005 ASME International Mechanical Engineering Congress and Exposition (ASME '05), Orlando, FL, USA, November 5-11, 2005, IMECE2005-80288.

[80]. Y. Zhao and X. Zhang, "Using Geometric Moire to Measure the Deformation in Polymeric Nanostructures," the 52nd International Symposium of the American Vacuum Society (AVS '05), Boston, MA, USA, October 30 - November 4, 2005.

[79]. S. Huang, B. Li, and X. Zhang, "Post-Processing Curvature Modification of Cantilever Microbolometer Focal Plane Arrays," the 52nd International Symposium of the American Vacuum Society (AVS '05), Boston, MA, USA, October 30 - November 4, 2005.

[78]. Z. Cao, T-Y Zhang, and X. Zhang, "Microbridge Testing of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Films on Silicon Wafers," the 52nd International Symposium of the American Vacuum Society (AVS '05), Boston, MA, USA, October 30 - November 4, 2005.

[77]. M. Yang and X. Zhang, "Electrical Assisted Patterning of Cardiac Myocytes Using Microfluidic Device as a Platform for Cardiovascular Electrical Stimulation Study," Proceeding of the 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '05), Boston, MA, USA, October 9-13, 2005, pp. 367-369.

[76]. Y. Zhao and X. Zhang, "A Three-Dimensional Substrate for Cardiac Myocyte Orientation and Contraction Force Measurements," Proceeding of the 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '05), Boston, MA, USA, October 9-13, 2005, pp. 166-168.

[75]. H. Yu, B. Li, A. Sharon, and X. Zhang, "A Parallel Analysis and Sorting Chip for Single Cell Study," Proceeding of the 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '05), Boston, MA, USA, October 9-13, 2005, pp. 862-864.

[74]. H. Yu, K. Shibata, B. Li, and X. Zhang, "Fabrication of a Hollow Metallic Microneedle Array using Scanning Laser Direct Writing," Proceeding of the 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '05), Boston, MA, USA, October 9-13, 2005, pp. 187-189.

[73]. X. Zhang, "Residual Stress and Fracture of Power MEMS Structures and Devices," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '05), Santa Fe, NM, USA, August 29 - September 1, 2005.

[72]. Y. Zhao, F. Li, and X. Zhang, "Determination of Deformations in Polymeric Nanostructures Using Geometric Moire Techniques for Biological Applications," Proceeding of the 13th International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers '05), Seoul, Korea, June 5-9, 2005, pp. 1748-1751.

[71]. S. Huang, B. Li, and X. Zhang, "Elimination of Stress-Induced Curvature in Microbolometer Focal Plane Arrays," Proceeding of the 13th International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers '05), Seoul, Korea, June 5-9, 2005, pp. 820-823.

[70]. Y. Zhao, H. Yu, and X. Zhang, "Creating Polymer-Based Microstructures with Various Aspect Ratios from a Single Template for Cellular Force Measurements," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 496-499.

[69]. Y. Zhao and X. Zhang, "Contraction Force Measurements in Cardiac Myocytes Using PDMS Pillar Arrays," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 834-837.

[68]. Z. Cao and X. Zhang, "Mechanism of Temperature-Induced Plastic Deformation of Amorphous Dielectric Films for MEMS Applications," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 471-474.

[67]. H. Yu, O. Balogun, B. Li, T. Murray, and X. Zhang, "Rapid Manufacturing of Embedded Microchannels from a Single Layered SU-8 and Determining the Dependence of SU-8 Young's Modulus on Exposure Dose with a Laser Acoustic Technique," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 654-657.

[66]. X. Zhang, "Creating Micro/Nano Fabricated Structures for Cellular Mechanical Force Measurements in Living Cells," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '05), Scottsdale, AZ, USA, January 3-6, 2005.

[65]. Y. Zhao and X. Zhang, "A Novel Pressure Indicator for Continuous Flow PCR Chip Using Micro Molded PDMS Pillar Arrays," Applications of Micron and Nanoscale Materials in Biology and Medicine, Mater. Res. Soc. Symp. Proc., 845 (2005) AA5.10.1-6.

[64]. Y. Zhao and X. Zhang, "Investigation upon Mechanical Properties of Thin Film Silicon under Cryogenic Temperature," Materials for Space Applications, Mater. Res. Soc. Symp. Proc., 851 (2005) NN5.6.1-6.

[63]. Z. Cao, T-Y Zhang, and X. Zhang, "Microbridge Nanoindentation Testing of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films," Fundamentals of Nanoindentation and Nanotribology III, Mater. Res. Soc. Symp. Proc., 841 (2005) R12.4.1-6.

[62]. Z. Cao and X. Zhang, "Thickness-Dependent Structural Relaxation of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films during Thermal Processing," Stability of Thin Films and Nanostructures, Mater. Res. Soc. Symp. Proc., 854 (2005) U8.1.1-6.

[61]. S. Huang and X. Zhang, "Stress Hysteresis and Thermal-Mechanical Behavior of PECVD Silicon Nitride and Ebeam Aluminum Films for Microbolometer Applications," Stability of Thin Films and Nanostructures, Mater. Res. Soc. Symp. Proc., 854 (2005) U10.11.1-6.

[60]. H. Yu, B. Li, and X. Zhang, "Ultrafast Fabrication of 3D Microstructures for MEMS Applications," the 51st International Symposium of the American Vacuum Society (AVS '04), Anaheim, CA, USA, November 14-19, 2004.

[59]. Y. Zhao, B. Li, and X. Zhang, "Determination of Young's Modulus for Silicon Membrane in Cryogenic Micropump using Laser Michaelson Interferometry," the 51st International Symposium of the American Vacuum Society (AVS '04), Anaheim, CA, USA, November 14-19, 2004.

[58]. Y. Zhao, B. Li, D. Ludlow, and X. Zhang, "Mechanical Performance of Silicon Diaphragm for Space Application," Proceeding of the 2004 ASME International Mechanical Engineering Congress and RD&D Expo (ASME '04), Anaheim, CA, USA, November 14-19, 2004, IMECE2004-62175.

[57]. H. Yu, B. Li, Y. Zhao, and X. Zhang, "Fabrication of Three-Dimensional SU-8 Microstructures for MEMS Applications," Proceeding of the 2004 ASME International Mechanical Engineering Congress and RD&D Expo (ASME '04), Anaheim, CA, USA, November 14-19, 2004, IMECE2004-62203.

[56]. H. Yu, B. Li, and X. Zhang, "Rapid Fabrication of Solid and Hollow SU-8 Microneedle Arrays Using Scanning Laser Direct Writing," BMES Annual Fall Meeting (BMES '04), Philadelphia, PA, USA, October 13-16, 2004.

[55]. Y. Zhao and X. Zhang, "Evaluation of Contraction Performance Cardiac Myocyte Using Micro Molded Pillars," BMES Annual Fall Meeting (BMES '04), Philadelphia, PA, USA, October 13-16, 2004.

[54]. Y. Zhao, H. Yu, and X. Zhang, "A Novel Pressure Indicator for Continuous FLow PCR Chip Using Micro Molded PDMS Pillar Arrays," BMES Annual Fall Meeting (BMES '04), Philadelphia, PA, USA, October 13-16, 2004.

[53]. Y. Zhao and X. Zhang, "Micropump Evaluation for Cryopreservation in On-Chip Cell Culture," Proceeding of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '04), Malmo, Sweden, September 26-30, 2004, Volume II, pp. 82-84.

[52]. Y. Zhao and X. Zhang, "In Situ Force Probing for Cardiac Myocyte Using Micro PDMS Pillar Array," Proceeding of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '04), Malmo, Sweden, September 26-30, 2004, Volume I, pp. 430-432.

[51]. H. Yu, O. Balogun, B. Li, T.W. Murray, and X. Zhang, "Building Embedded Microchannels Using a Single Layer SU-8, and Determining Young's Modulus Using Laser Acoustic Technique," Proceeding of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '04), Malmo, Sweden, September 26-30, 2004, Volume II, pp. 73-75.

[50]. H. Yu, B. Li, and X. Zhang, "An Integratable Concave and Convex Microlens Using Sectional Exposure of SU-8," Proceeding of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '04), Malmo, Sweden, September 26-30, 2004, Volume I, pp. 165-167.

[49]. H. Yu, Y. Zhao, B. Li, and X. Zhang, "Three-Dimensional Microvalves based on Single-Layered SU-8 for Lab-on-Chip Application," Proceeding of the 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '04), Malmo, Sweden, September 26-30, 2004, Volume II, pp. 76-78.

[48]. X. Zhang, "Residual Stress and Fracture of Power MEMS Structures and Devices," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '04), Wintergreen, VA, USA, August 18-20, 2004.

[47]. Y. Zhao and X. Zhang, "Evaluation of Contraction Performance for Cardiac Myocyte Using Micro Molded Pillars," BioMEMS & NANOtech World 2004, Washington, DC, USA, August 16-17, 2004.

[46]. Y. Zhao and X. Zhang, "Microchip for Subcellular Mechanics Study in Living Cells," BioMEMS & NANOtech World 2004, Washington, DC, USA, August 16-17, 2004.

[45]. B. Li, S. Huang, and X. Zhang, "Transient Mechanical and Electrical Properties of Uncooled Resistive Microbolometer Focal Plane Arrays," Proceedings of SPIE, SPIE's 49th Annual Meeting, Denver, Co, USA, August 2-6, 2004, Vol. 5564, pp. 123-132.

[44]. Y. Zhao and X. Zhang, "Nanomachined Structures for Cell Migration and Traction Force Measurements," Thin Film & Small Scale Mechanical Behavior, Gordon Research Conference, Waterville, ME, USA, July 18-23, 2004.

[43]. Z. Cao and X. Zhang, "Residual Stress and Fracture of Power MEMS Structures and Devices," Thin Film & Small Scale Mechanical Behavior, Gordon Research Conference, Waterville, ME, USA, July 18-23, 2004.

[42]. Y. Zhao, H. Yu, B. Li, and X. Zhang, "Micro Molded PDMS Structures for Cardiac Myocyte Restoring Force Measurements," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '04), Hilton Head Island, SC, USA, June 6-10, 2004, pp. 394-395.

[41]. H. Yu, Y. Zhao, B. Li, and X. Zhang, "Rapid 3D Manufacture of Freeform Single-Layered SU-8 Microstructures and Microdevices by Using a Scanning Laser System," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '04), Open Poster, Hilton Head Island, SC, USA, June 6-10, 2004.

[40]. Y. Zhao, B. Li, and X. Zhang, "Pumping Capacity and Reliability of Silicon-Based Micro Pump for Satellite Instrumentation," IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '04), Open Poster, Hilton Head Island, SC, USA, June 6-10, 2004.

[39]. H. Yu, B. Li, and X. Zhang, "Direct Scanning Laser Writing of 3D Microstructures," Proceeding of Nanotechnology Conference and Trade Show (Nanotech '04), Boston, MA, USA, March 7-11, 2004, pp. 461-464.

[38]. Y. Zhao, B. Li, D. Ludlow, and X. Zhang, "Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump," Proceeding of Nanotechnology Conference and Trade Show (Nanotech '04), Boston, MA, USA, March 7-11, 2004, pp. 406-409.

[37]. X. Zhang, "Creating Micro/Nano Fabricated Structures for Cellular Mechanical Force Measurements in Living Cells," NSF Design, Service and Manufacturing Grantees and Research Conference (NSF '04), Dallas, TX, USA, January 5-8, 2004.

[36]. H. Yu, B. Li, and X. Zhang, "Rapid Prototyping of 3D Microstructures by Direct Scanning Laser Writing," International Semiconductor Device Research Symposium (ISDRS '03), Washington, DC, USA, December 10-12, 2003.

[35]. H. Yu, A. Gruntzig, A. Sharon, B. Li, and X. Zhang, "Direct Writing of 3D Microstructures Using a Scanning Laser System," Micro- and Nanosystems, Mater. Res. Soc. Symp. Proc., 782 (2004) A11.5.1-6.

[34]. Y. Zhao, D.J. Ludlow, B. Li, and X. Zhang, "Evaluation of Design and Performance of a Cryogenic MEMS Micropump Realized with Si-Based Diaphragm Using Combination of ZYCO/WYCO Interferometer and Raman Spectroscopy," Micro- and Nanosystems, Mater. Res. Soc. Symp. Proc., 782 (2004) A5.52.1-6.

[33]. Z. Cao, B. Li, and X. Zhang, "Investigation of Thermo-Mechanical Behavior of Multi-Layer Thin-Film Structures for MOEMS and Power MEMS Applications," Thin Films-Stresses and Mechanical Properties X, Materials Research Society Fall Meeting, Boston, MA, USA, December 1-5, 2003.

[32]. H. Yu, A. Gruntzig, Y. Zhao, A. Sharon, B. Li, and X. Zhang, "Rapid Prototyping 3D Microstructures on Soft and Rigid Templates Using a Scanning Laser System," Proceeding of the 7th International Conference on Miniaturized Chemical and BioChemical Analysis Systems (microTAS '03), Squaw Valley, CA, USA, October 5-9, 2003, pp. 347-350.

[31]. X. Zhang, "Residual Stress and Fracture of Power MEMS Structures and Devices," Mechanics of Materials & Devices and Structural Mechanics, AFOSR Contractors' Meeting (AFOSR '03), Santa Fe, NM, USA, September 8-11, 2003.

[30]. B. Li, X. Tang, H. Xie, and X. Zhang, "Focused Ion Beam (FIB) Nano-Machining and FIB Moire Technique for Strain Analysis in MEMS/NEMS Structures and Devices," Proceeding of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan, January 19-23, 2003, pp. 674-677.

[29]. A. Sharon, A. Bilsing, G. Lewis, and X. Zhang, "Manufacturing of 3D Microstructures Using Novel UPSAMS Process (Ultra Precision Manufacturing of Self-Assembled Micro Systems)," Proceeding of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan, January 19-23, 2003, pp. 542-545.

[28]. B. Li, X. Tang, H. Xie, and X. Zhang, "Focused Ion Beam Nano-Machined Structures for Strain Analysis by a Moire Technique," Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines, Mater. Res. Soc. Symp. Proc., 741 (2003) 199-204.

[27]. A. Sharon, A. Bilsing, G. Lewis, and X. Zhang, "Manufacturing of 3D Microstructures Using Novel UPSAMS Process for MEMS Applications," Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines, Mater. Res. Soc. Symp. Proc., 741 (2003) 151-156.

[26]. N. Miki, C.J. Teo, L. Ho, and X. Zhang, "Precision Fabrication of High-Speed Micro-Rotors Using Deep Reactive Ion Etching (DRIE)," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '02), Hilton Head Island, SC, USA, June 3-6, 2002, pp. 265-268.

[25]. C.M. Spadaccini, A. Mehra, J. Lee, S. Lukachko, X. Zhang, and I.A. Waitz, "High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines," Proceedings of ASME TURBO EXPO, 2002 - Land, Sea & Air, Amsterdam, The Netherlands, June 2-6, 2002, GT-2002-30082.

[24]. N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, and S.M. Spearing, "A Study of Multi-Stack Silicon-Direct Wafer Bonding for MEMS Manufacturing," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 407-410.

[23]. X. Zhang, K-S Chen, and S.M. Spearing, "Residual Stress and Fracture of Thick Dielectric Films for Power MEMS Applications," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 164-167.

[22]. C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, and I.A. Waitz, "Development of a Catalytic Silicon Micro-Combustor for Hydrocarbon-Fueled Power MEMS," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 228-231.

[21]. X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz, "Development of Polysilicon Igniters and Temperature Sensors for a Micro Gas Turbine Engine," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 280-283.

[20]. A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing, "Low Temperature Silicon Wafer Bonding for MEMS Applications," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 411-414.

[19]. C.W. Wong, X. Zhang, S.A. Jacobson, and A.H. Epstein, "A Self-Acting Thrust Bearing for High-Speed Micro-Rotors," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 276-279.

[18]. K-S Chen, X. Zhang, and S.M. Spearing, "Processing of Thick Dielectric Films for Power MEMS: Stress and Fracture," Materials Science of Microelectromechanical System (MEMS) Devices IV, Mater. Res. Soc. Symp. Proc., 657 (2001) EE8.4.1-6.

[17]. X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz, "Development of Polysilicon Materials for Igniters and Temperature Sensors in a Micro Gas Turbine Engine," Materials Science of Microelectromechanical System (MEMS) Devices IV, Materials Research Society Fall Meeting, Boston, MA, USA, November 26-30, 2001.

[16]. C.M. Spadaccini, X. Zhang, C.P. Cadou, and I.A. Waitz, "Development of Catalyst Materials for a Micro-Scale Combustion System," Materials Science of Microelectromechanical System (MEMS) Devices IV, Materials Research Society Fall Meeting, Boston, MA, USA, November 26-30, 2001.

[15]. S. Sullivan, X. Zhang, A.A. Ayon, and J.G. Brisson, "Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine," Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 10-14, 2001, pp. 1606-1609.

[14]. A.A. Ayon, J.M. Protz, R. Khanna, X. Zhang, and A.H. Epstein, "Application of Deep Silicon Etching and Wafer Bonding in the MicroManufacturing of Turbochargers and Micro Gas Turbine Engines," the 47th International Symposium of the American Vacuum Society (AVS '00), Boston, MA, USA, October 2-6, 2000.

[13]. X. Zhang, R. Ghodssi, K-S Chen, A.A. Ayon, and S.M. Spearing, "Residual Stress Characterization of Thick PECVD TEOS Film for Power MEMS Applications," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-9, 2000, pp. 316-319.

[12]. A.A. Ayon, X. Zhang, and R. Khanna, "Ultra Deep Anisotropic Silicon Trenches Using Deep Reactive Ion Etching (DRIE)," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-9, 2000, pp. 339-342.

[11]. L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, and A.H. Epstein, "Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings," Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-9, 2000, pp. 43-47.

[10]. R. Ghodssi, X. Zhang, K-S Chen, K.A. Lohner, S.M. Spearing, and M.A. Schmidt, "Residual Stress Characterization of Thick PECVD Oxide Film for MEMS Application," the 46th International Symposium of the American Vacuum Society (AVS '99), Seattle, WA, USA, October 25-29, 1999.

[9]. R. Ghodssi, L.G. Frechette, S.F. Nagle, X. Zhang, A.A. Ayon, S.D. Senturia, and M.A. Schmidt, "Thick Buried Oxide in Silicon (TBOS): An Integrated Fabrication Technology for Multi-Stack Wafer-Bonded MEMS Processes," Technical Digest of the 10th International Conference on Solid-State Sensors and Actuators (Transducer '99), Sendai, Japan, June 7-10, 1999, pp. 1456-1459.

[8]. X. Zhang, T-Y Zhang, and Y. Zohar, "Rapid Thermal Annealing for Residual-Stress Relaxation in Undoped or Doped Polysilicon Thin Films," Materials Science of Microelectromechanical System (MEMS) Devices, Materials Research Society Symposium Proceedings, 546 (1999) 27-32.

[7]. X. Zhang, Y. Zohar, and T-Y Zhang, "Blister-Like Local Buckling of Polysilicon Microbeams during Wet-Release," Proceeding of Microelectromechanical Systems (MEMS), ASME International Mechanical Engineering Congress and Exposition (ASME '98), Anaheim, CA, USA, November 15-20, 1998, DSC-Vol. 66, pp. 379-384.

[6]. X. Zhang, T-Y Zhang, and Y. Zohar, "Mechanism of Residual Stress Evolution of LPCVD-Polysilicon Thin Films during Rapid Thermal Annealing," Materials Reliability in Microelectronics VIII, Materials Research Society Spring Meeting, San Francisco, CA, USA, April 13-17, 1998.

[5]. X. Zhang, T-Y Zhang, and Y. Zohar, "Buckling Evolution of Microelectromechanical Structures," Microelectromechanical Structures for Materials Research, Mater. Res. Soc. Symp. Proc., 518 (1998) 155-160.

[4]. X. Zhang, T-Y Zhang, and Y. Zohar, "FEM Simulation of Micro-Rotating-Structures and Their Applications in Measurement of Residual Stresses in Thin Films," Thin-Films - Stresses and Mechanical Properties VII, Mater. Res. Soc. Symp. Proc., 505 (1998) 21-26.

[3]. X. Zhang, T-Y Zhang, M. Wong, and Y. Zohar, "Effects of High-Temperature Rapid Thermal Annealing on the Residual Stress of LPCVD-Polysilicon Thin Films," Proceeding of the 10th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, January 26-30, 1997, pp. 535-540.

[2]. X. Zhang, T-Y Zhang, Y. Zohar, and S.B. Lee, "Investigation on Subsurface Damage in Silicon Wafers," Defects in Electronic Materials II, Mater. Res. Soc. Symp. Proc., 442 (1997) 199-204.

[1]. X. Zhang, Y. Zohar, and T-Y Zhang, "Measurements of Residual Stresses in Low-Stress Silicon Nitride Thin Films Using Micro-Rotating Structures," Materials for Mechanical and Optical Microsystems, Mater. Res. Soc. Symp. Proc., 444 (1997) 111-116.

Book Chapter
[2]. X. Zhang, Y. Zhao, and X. Zheng, "Micro/nanostructures for Measuring Cellular Forces in Cardiac Myocytes," Nanomanufacturing, American Scientific Publishers, in press.

[1]. Y. Zhao and X. Zhang, "Nanobiotechnology: an Engineering's Foray into Biology," Advances in Computers, Academic Press, 71, 39-102, 2007.

Patent
[2]. S. Huang and X. Zhang, "Uncooled Cantilever Infrared Detector Focal Plane Arrays based on Differential Capacitive Sensing."

[1]. B. Li, X. Zhang, T. Bifano, and A. Sharon, "Uncooled Cantilever Microbolometer Focal Plane Arrays with mK Temperature Resolution."

Ph.D. Thesis
[13]. Xiaoning "Travis" Wang Li, "Micro-engineered Structures and Devices for High-sensitivity Multispectral MRI," Ph.D. Thesis, 2008-.

[12]. Wei Li, "Elastic and Viscoelastic Characterization of Soft Polymer Materials for Biomedical Applications," Ph.D. Thesis, 2008-.

[11]. Kebin Fan, "MEMS-based Structures and Devices: Towards a Functional Terahertz Metamaterial Electromagnetic System," Ph.D. Thesis, 2007-.

[10]. Bradley Kaanta, "Micro Gas Chromatography for Harsh Downhole Environment," Ph.D. Thesis, 2007-.

[9]. Ping Du, "MEMS-based Conductive Polymer Bioactuators," Ph.D. Thesis, 2007-.

[8]. I-Kuan "Ken" Lin, "Thermo- and Electromechanics of Multilayer Thin-Film Microstructures fro Sensing and Imaging Applications," Ph.D. Thesis, 2006-.

[7]. Hu "Tiger" Tao, "MEMS Enhanced Metamaterials: Towards Filling the Terahertz Gap," Ph.D. Thesis, 2006-.

[6]. Xiaoyu "Rayne" Zheng, "Cellular Mechanical Force Mapping Utilizing Optical Moire," Ph.D. Thesis, 2005-.

[5]. Yiling Qiu, "Impedance Spectroscopy for Cardiology on Chip: An AC-Electrokinetics-Assisted Electrochemical Impedance Assay for Analyzing Excitable Cells," Ph.D. Thesis, 2005-.

[4]. Shusen "Forest" Huang, "Development of Double-Cantilever Infrared Detectors," Ph.D. Thesis, April 2007.

[3]. Zhiqiang "Jay" Cao, "Mechanical Behaviors of PECVD Dielectric Films for MEMS Applications," Ph.D. Thesis, November 2006.

[2]. Hui "Grace" Yu, "Flexible Fabrication of Three-Dimensional Multi-Layered Microstructures Using a Scanning Laser System," Ph.D. Thesis, April 2006.

[1]. Yi Zhao, "Miniaturized Biomechanosensors for Cardiomechanical Studies," Ph.D. Thesis, December 2005.

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