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Thermomechanical Behavior of Multilayer Microcantilevers
Archival Journal Papers
Inelastic Deformation of Bilayer Microcantilevers with Nanoscale Coating,
I-K Lin, X. Zhang*, and Y. Zhang*,
Sensors and Actuators A: Physical, 2011, 168(1): 1-9. [DOI;
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Thermomechanical Behavior and Microstructural Evolution of SiNx/Al Bimaterial Microcantilevers,
I-K Lin, X. Zhang, and Y. Zhang,
Journal of Micromechanics and Microengineering, 2009, 19(8): 085010(10pp). [DOI;
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Development of Double-Cantilever Infrared Detectors: Fabrication, Curvature Control and Demonstration of Thermal Detection,
S. Huang, H. Tao, I-K Lin, and X. Zhang,
Sensors and Actuators A: Physical, 2008, 145-146: 231-240. [DOI;
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The Deformation of Microcantilever-Based Infrared Detectors During Thermal Cycling,
I-K Lin, Y. Zhang, and X. Zhang,
Journal of Micromechanics and Microengineering, 2008, 18(7): 075012(9pp). [DOI;
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Study of Gradient Stress in Bimaterial Cantilever Structures for Infrared Applications,
S. Huang and X. Zhang,
Journal of Micromechanics and Microengineering, 2007, 17(7): 1211-1219. [DOI;
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Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures,
S. Huang and X. Zhang,
Sensors and Actuators A: Physical, 2007, 134(1): : 177-185. [DOI;
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Elimination of Stress-Induced Curvature in Microcantilever Infrared Focal Plane Arrays,
S. Huang, B. Li, and X. Zhang,
Sensors and Actuators A: Physical, 2006, 130-131: 331-339. [DOI;
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Extension of the Stoney Formula for Film-Substrate Systems with Gradient Stress for MEMS Applications,
S. Huang and X. Zhang,
Journal of Micromechanics and Microengineering, 2006, 16(2): 382-389. [DOI;
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