I-K Lin, X. Zhang*, and Y. Zhang*,
"Inelastic Deformation of Bilayer Microcantilevers with Nanoscale Coating,"
Sensors and Actuators A: Physical, 2011, 168(1): 1-9. [DOI;
PDF]| >> Zhang Lab: Photonic Microsystem |
MEMS-based Cantilever Infrared Detectors
Representative Publications
I-K Lin, X. Zhang*, and Y. Zhang*,
"Inelastic Deformation of Bilayer Microcantilevers with Nanoscale Coating,"
Sensors and Actuators A: Physical, 2011, 168(1): 1-9. [DOI;
PDF]
I-K Lin, X. Zhang, and Y. Zhang,
"Thermomechanical Behavior and Microstructural Evolution of SiNx/Al Bimaterial Microcantilevers,"
Journal of Micromechanics and Microengineering, 2009, 19(8): 085010(10pp). [DOI;
PDF]
S. Huang, H. Tao, I-K Lin, and X. Zhang,
"Development of Double-Cantilever Infrared Detectors: Fabrication, Curvature Control and Demonstration of Thermal Detection,"
Sensors and Actuators A: Physical, 2008, 145-146: 231-240. [DOI;
PDF]
I-K Lin, Y. Zhang, and X. Zhang,
"The Deformation of Microcantilever-Based Infrared Detectors During Thermal Cycling,"
Journal of Micromechanics and Microengineering, 2008, 18(7): 075012(9pp). [DOI;
PDF]
S. Huang and X. Zhang,
"Study of Gradient Stress in Bimaterial Cantilever Structures for Infrared Applications,"
Journal of Micromechanics and Microengineering, 2007, 17(7): 1211-1219. [DOI;
PDF]
S. Huang and X. Zhang,
"Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures,"
Sensors and Actuators A: Physical, 2007, 134(1): 177-185. [DOI;
PDF]
S. Huang, B. Li, and X. Zhang,
"Elimination of Stress-Induced Curvature in Microcantilever Infrared Focal Plane Arrays,"
Sensors and Actuators A: Physical, 2006, 130-131: 331-339. [DOI;
PDF]
S. Huang and X. Zhang,
"Extension of the Stoney Formula for Film-Substrate Systems with Gradient Stress for MEMS Applications,"
Journal of Micromechanics and Microengineering, 2006, 16(2): 382-389. [DOI;
PDF]
Ph.D. Thesis
I-Kuan Lin,
"Mechanical and Material Characterization of Bilayer Microcantilevers for MEMS-Based IR Detector Applications,"
Ph.D. Thesis, Boston University. (Advisor: Xin Zhang)
Shusen Huang,
"Development of Double-Cantilever Infrared Detectors,"
Ph.D. Thesis, Boston University. (Advisor: Xin Zhang)