>> Zhang Lab: Photonic Microsystem (homepage)

Bimaterial Cantilevers: Engineering Mechanics for the Next Generation

Representative Publications (#denotes graduate students/postdocs supervised by X. Zhang; *denotes corresponding author by X. Zhang; +denotes contributed equally.)

I-K Lin#, X. Zhang*, Y. Zhang*, "Inelastic Deformation of Bilayer Microcantilevers with Nanoscale Coating," Sensors and Actuators A: Physical, 2011, 168(1): 1-9. [DOI]

I-K Lin#, X. Zhang*, Y. Zhang*, "Thermomechanical Behavior and Microstructural Evolution of SiNx/Al Bimaterial Microcantilevers," Journal of Micromechanics and Microengineering, 2009, 19(8): 085010(10pp). [DOI]

I-K Lin#, Y. Zhang*, X. Zhang*, "The Deformation of Microcantilever-Based Infrared Detectors During Thermal Cycling," Journal of Micromechanics and Microengineering, 2008, 18(7): 075012(9pp). [DOI]

S. Huang#, H. Tao#, I-K Lin#, X. Zhang*, "Development of Double-Cantilever Infrared Detectors: Fabrication, Curvature Control and Demonstration of Thermal Detection," Sensors and Actuators A: Physical, 2008, 145-146: 231-240. [DOI]

S. Huang# and X. Zhang*, "Study of Gradient Stress in Bimaterial Cantilever Structures for Infrared Applications," Journal of Micromechanics and Microengineering, 2007, 17(7): 1211-1219. [DOI]

S. Huang# and X. Zhang*, "Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures," Sensors and Actuators A: Physical, 2007, 134(1): 177-185. [DOI]

S. Huang#, B. Li, X. Zhang*, "Elimination of Stress-Induced Curvature in Microcantilever Infrared Focal Plane Arrays," Sensors and Actuators A: Physical, 2006, 130-131: 331-339. [DOI]

S. Huang# and X. Zhang*, "Extension of the Stoney Formula for Film-Substrate Systems with Gradient Stress for MEMS Applications," Journal of Micromechanics and Microengineering, 2006, 16(2): 382-389. [DOI]

Ph.D. Dissertations

I-Kuan Lin, "Mechanical and Material Characterization of Bilayer Microcantilevers for MEMS-Based IR Detector Applications," Ph.D. Dissertation, Boston University. (Advisor: Xin Zhang; January 2011)

Shusen Huang, "Development of Double-Cantilever Infrared Detectors," Ph.D. Dissertation, Boston University. (Advisor: Xin Zhang; May 2007)

Back to Zhang Lab Homepage