Archival Journal Publications
[103].
N. Kumar, A.C. Strikwerda, K. Fan, X. Zhang, R.D. Averitt, P.C.M. Planken, and A.J.L. Adam,
"THz Near-Field Faraday Imaging in Hybrid Metamaterials,"
Optics Express, 2012, 20(10): 11277-11287. [DOI;
PDF]
[102].
C.A. Werley, K. Fan, A.C. Strikwerda, S.M. Teo, X. Zhang, R.D. Averitt, and K.A. Nelson,
"Time-Resolved Imaging of Near-Fields in THz Antennas and Direct Quantitative Measurement of Field Enhancements,"
Optics Express, 2012, 20(8): 8551-8567. [DOI;
PDF]
[101].
K. Fan, A.C. Strikwerda, R.D. Averitt, and X. Zhang,
"Three-Dimensional Magnetic Terahertz Metamaterials Using a Multilayer Electroplating Technique,"
Journal of Micromechanics and Microengineering, 2012, 22(4): 045011(9pp). [DOI;
PDF]
[100].
P. Du, X. Wang, I-K Lin, and X. Zhang,
"Effects of Composition and Annealing Temperature on the Mechanical Properties and Residual Stress of Silicon Oxycarbide Films,"
Sensors and Actuators A: Physical, 2012, 176: 90-98. [DOI;
PDF]
[99].
A. Marconnet, M. Panzer, S. Yerci, S. Minissale, X. Wang, X. Zhang, L. D. Negro, and K.E. Goodson,
"Thermal Conductivity and Photoluminescence of Light-Emitting Silicon Nitride Films,"
Applied Physics Letters, 2012, 100(5): 051908(4pp). [DOI;
PDF]
[98].
W.-C. Chen, A. Totachawattana, K. Fan, J.L. Ponsetto, A.C. Strikwerda, X. Zhang, R.D. Averitt, and W.J. Padilla,
"Single-Layer Terahertz Metamaterials with Bulk Optical Constants,"
Physical Review B, 2012, 85(3): 035112(6pp). [DOI;
PDF]
[97].
E.M. Frohlich, X. Zhang, and J.L. Charest,
"The Use of Controlled Surface Topography and Flow-induced Shear Stress to Influence Renal Epithelial Cell Function,"
Integrative Biology, 2012, 4(1): 75-83. [DOI;
PDF]
[96].
K. Iwaszczuk, A.C. Strikwerda, K. Fan, X. Zhang, R.D. Averitt, and P. Uhd Jepsen,
"Flexible Metamaterial Absorbers for Stealth Applications at Terahertz Frequencies,"
Optics Express, 2012, 20(1): 635-643. [DOI;
PDF]
[95].
Y. Minowa, M. Nagai, H. Tao, K. Fan, A.C. Strikwerda, X. Zhang, R.D. Averitt, and K. Tanaka,
"Extremely Thin Metamaterial as Slab Waveguide at Terahertz Frequencies,"
IEEE Transactions on Terahertz Science and Technology, 2011, 1(2): 441-449. [DOI;
PDF]
[94].
H. Tao, E.A. Kadlec, A.C. Strikwerda, K. Fan, W.J. Padilla, R.D. Averitt, E.A. Shaner, and X. Zhang,
"Microwave and Terahertz Wave Sensing with Metamaterials,"
Optics Express, 2011, 19(22): 21620-21626. [DOI;
PDF]
Highlighted by Science
in Vol. 334, 18 November 2011.
[PDF]
[93].
A.C. Strikwerda, R.D. Averitt, K. Fan, X. Zhang, G.D. Metcalfe, and M. Wraback,
"Electromagnetic Composite-Based Reflecting Terahertz Waveplates,"
International Journal of High Speed Electronics and Systems, 2011, 20(3): 583-588. [DOI;
PDF]
[92].
P. Du, X. Zheng, I-K Lin, and X. Zhang,
"Effect of Loading Rates on Cellular Force Measurements by Polymer Micropillar based Transducers,"
Applied Physics Letters, 2011, 99(8): 083701(3pp). [DOI;
PDF]
[91].
H. Tao, L. Chieffo, M.A. Brenckle, S.M. Siebert, M. Liu, A.C. Strikwerda, K. Fan, D.L. Kaplan, X. Zhang, R.D. Averitt, and F.G. Omenetto,
"Metamaterials on Paper as a Sensing Platform,"
Advanced Materials, 2011, 23(28): 3197-3201. [DOI;
PDF]
[90].
P-H Wu, I-K Lin, H-Y Yan, K-S Ou, K-S Chen, and X. Zhang,
"Mechanical Property Characterization of Sputtered and Plasma Enhanced Chemical Deposition (PECVD) Silicon Nitride Films after Rapid Thermal Annealing,"
Sensors and Actuators A: Physical, 2011, 168(1):117-126. [DOI;
PDF]
[89].
I-K Lin, X. Zhang*, and Y. Zhang*,
"Inelastic Deformation of Bilayer Microcantilevers with Nanoscale Coating,"
Sensors and Actuators A: Physical, 2011, 168(1): 1-9. [DOI;
PDF]
[88].
K. Fan, A.C. Strikwerda, H. Tao, X. Zhang*, and R.D. Averitt*,
"Stand-up Magnetic Metamaterials at Terahertz Frequencies,"
Optics Express, 2011, 19(13): 12619-12627. [DOI;
PDF]
[87].
B.C. Kaanta, A.J. Jonca, H. Chen, and X. Zhang,
"Temperature Distribution on Thermal Conductivity Detectors for Flow Rate Insensitivity,"
Sensors and Actuators A: Physical, 2011, 167(2): 146-151. [DOI;
PDF]
[86].
E. Ekmekci, A.C. Strikwerda, K. Fan, G. Keiser, X. Zhang, G. Turhan-Sayan, and R.D. Averitt,
"Frequency Tunable Terahertz Metamaterials Using Broadside Coupled Split-Ring Resonators,"
Physical Review B, 2011, 83(19): 193103(4pp). [DOI;
PDF]
[85].
X. Zheng and X. Zhang,
"Opto-Mechanical Platforms for Cell Force Study,"
Micro and Nano Letters, 2011, 6(5): 332-336. [DOI;
PDF]
[84].
H. Tao, A. Strikwerda, K. Fan, W.J. Padilla, X. Zhang*, and R.D. Averitt*,
"MEMS Based Structurally Tunable Metamaterials at Terahertz Frequencies,"
Journal of Infrared, Milimeter, and Terahertz Waves, 2011, 32(5): 580-595. [DOI;
PDF]
[83].
X. Zheng and X. Zhang,
"Microsystems for Cellular Force Measurement: A Review,"
Journal of Micromechanics and Microengineering, 2011, 21(5): 054003(13pp). [DOI;
PDF]
[82].
X. Zheng and X. Zhang,
"Whole Field Decoupling of Predistortion on Polymeric Cell Force Transducer,"
Applied Physics Letters, 2011, 98(17): 173701(3pp). [DOI;
PDF]
Selected for Virtual Journal of Biological Physics Research - Vol. 21, Issue 9, May 2011.
[81].
B.C. Kaanta, H. Chen, and X. Zhang,
"Effect of Forced Convection on Thermal Distribution in Micro Thermal Conductivity Detectors,"
Journal of Micromechanics and Microengineering, 2011, 21(4): 045017(8pp). [DOI;
PDF]
[80].
H. Tao, W.J. Padilla, X. Zhang*, and R.D. Averitt*,
"Recent Progress in Electromagnetic Metamaterial Devices for Terahertz Applications,"
IEEE Journal of Selected Topics in Quantum Electronics, 2011, 17(1): 92-101. [DOI;
PDF]
[79].
H. Tao, A.C. Strikwerda, M. Liu, J.P. Mondia, E. Ekmekci, K. Fan, D.L. Kaplan, W.J. Padilla, X. Zhang, R.D. Averitt, and F.G. Omenetto,
"Performance Enhancement of Terahertz Metamaterials on Ultrathin Substrates for Sensing Applications,"
Applied Physics Letters, 2010, 97(26): 261909(3pp). [DOI;
PDF]
[78].
P. Du, X. Lin, and X. Zhang,
"A Multilayer Bending Model for Conducting Polymer Actuators,"
Sensors and Actuators A: Physical, 2010, 163(1): 240-246. [DOI;
PDF]
[77].
B.C. Kaanta, H. Chen, and X. Zhang,
"Novel Device for Calibration-Free Flow Rate Measurements in Micro Gas Chromatographic Systems,"
Journal of Micromechanics and Microengineering, 2010, 20(9): 095034(7pp). [DOI;
PDF]
[76].
P. Du, I-K Lin, H. Lu, and X. Zhang,
"Extension of the Beam Theory for Polymer Bio-Transducers with Low Aspect Ratios and Viscoelastic Characteristics,"
Journal of Micromechanics and Microengineering, 2010, 20(9): 095016(13pp). [DOI;
PDF]
[75].
H. Tao, J.J. Amsden, A.C. Strikwerda, K. Fan, D.L. Kaplan, X. Zhang*, R.D. Averitt*, and F.G. Omenetto*,
"Metamaterial Silk Composites at Terahertz Frequencies,"
Advanced Materials, 2010, 22(32): 3527-3531. [DOI;
PDF]
Inside Front Cover of Advanced Materials
in Vol. 22, 24 August 2010.
[PDF]
[74].
X. Zheng, H.K. Surks, and X. Zhang,
"A Versatile Cell Contractility Mapping Transducer Utilizing Moire-Based Technique,"
Journal of Microelectromechanical Systems, 2010, 19(4): 764-773. [DOI;
PDF]
[73].
H. Tao, C.M. Bingham, D. Pilon, K. Fan, A.C. Strikwerda, D. Shrekenhamer, W.J. Padilla, X. Zhang*, and R.D. Averitt*,
"A Dual Band Terahertz Metamaterial Absorber,"
Journal of Physics D: Applied Physics, 2010, 43(22): 225102(5pp). [DOI;
PDF]
Selected to be part of the Highlights of 2010.
[72].
X. Zheng, H.K. Surks, and X. Zhang,
"Single Cell Contractility Studies Based On Compact Moire System Over Periodic Gratings,"
Applied Physics Letters, 2010, 96(21): 213705(3pp). [DOI;
PDF]
Selected for Virtual Journal of Biological Physics Research - Vol. 19, Issue 11, June 2010.
[71].
B.C. Kaanta, H. Chen, and X. Zhang,
"A Monolithically Fabricated Gas Chromatography Separation Column with an Integrated High Sensitivity Thermal Conductivity Detector,"
Journal of Micromechanics and Microengineering, 2010, 20(5): 055016(6pp). [DOI;
PDF]
[70].
B.J. Hansen, N. Kouklin, G. Lu, I-K Lin, J. Chen, and X. Zhang,
"Transport, Analyte Detection and Opto-Electronic Response of p-Type CuO Nanowires,"
Journal of Physical Chemistry C, 2010, 114(6): 2440-2447. [DOI;
PDF]
[69].
H. Tao, A.C. Strikwerda, K.B. Fan, W.J. Padilla, X. Zhang*, and R.D. Averitt*,
"Reconfigurable Terahertz Metamaterials,"
Physical Review Letters, 2009, 103(14): 147401(4pp). [DOI;
PDF]
[68].
I-K Lin, K-S Ou, Y-M Liao, Y. Liu, K-S Chen, and X. Zhang,
"Viscoelastic Characterization and Modeling of Polymer Transducers for Biological Applications,"
Journal of Microelectromechanical Systems, 2009, 18(5): 1087-1099. [DOI;
PDF]
[67].
Y. Qiu, R. Liao, and X. Zhang,
"Intervention of Cardiomyocyte Death Based on Real-Time Monitoring of Cell Adhesion through Impedance Sensing,"
Biosensors and Bioelectronics, 2009, 25(1): 147-153. [DOI;
PDF]
[66].
I-K Lin, X. Zhang, and Y. Zhang,
"Thermomechanical Behavior and Microstructural Evolution of SiNx/Al Bimaterial Microcantilevers,"
Journal of Micromechanics and Microengineering, 2009, 19(8): 085010(10pp). [DOI;
PDF]
[65].
Y. Qiu, R. Liao, and X. Zhang,
"Impedance-Based Monitoring of Ongoing Cardiomyocyte Death Induced by Tumor Necrosis Factor Alpha,"
Biophysical Journal, 2009, 96(5): 1985-1991. [DOI;
PDF]
[64].
Y. Wang, X. Zheng, N. Riddick, M. Bryden, W. Baur, X. Zhang, and H.K. Surks,
"ROCK Isoform Regulation of Myosin Phosphatase and Contractility in Vascular Smooth Muscle Cells,"
Circulation Research, 2009, 104(4): 531-540. [DOI;
PDF]
[63].
A.C. Strikwerda, K. Fan, H. Tao, D.V. Pilon, X. Zhang*, and R.D. Averitt*,
"Comparison of Birefringent Electric Split-Ring Resonator and Meanderline Structure as Quarter-Wave Plates at Terahertz Frequencies,"
Optics Express, 2009, 17(1): 136-149. [DOI;
PDF]
[62].
I-K Lin, Y-M Liao, Y. Liu, K-S Ou, K-S Chen, and X. Zhang,
"Viscoelastic Mechanical Behavior of Soft Microcantilever-Based Force Sensors,"
Applied Physics Letters, 2008, 93(25): 251907(3pp). [DOI;
PDF]
Selected for Virtual Journal of Nanoscale Science & Technology - Vol. 19, Issue 2, January 2009.
[61].
H. Tao, C.M. Bingham, A.C. Strikwerda, D. Pilon, D. Shrekenhamer, N.I. Landy, K. Fan. X. Zhang*, W.J. Padilla, and R.D. Averitt*,
"Highly Flexible Wide Angle of Incidence Terahertz Metamaterial Absorber: Design, Fabrication, and Characterization,"
Physical Review B - Rapid Communications, 2008, 78(24): 241103(4pp). [DOI;
PDF]
[60].
H. Tao, A.C. Strikwerda, K. Fan, C.M. Bingham, W.J. Padilla, X. Zhang*, and R.D. Averitt*,
"Terahertz Metamaterials on Free-Standing Highly-Flexible Polyimide Substrates,"
Journal of Physics D: Applied Physics, 2008, 41(23): 232004(5pp). [DOI;
PDF]
Selected to be part of the Highlights of 2008.
[59].
X. Zheng and X. Zhang,
"An Optical Moire Technique for Cell Traction Force Mapping,"
Journal of Micromechanics and Microengineering, 2008, 18(12): 125006(10pp). [DOI;
PDF]
Selected for Inclusion in IOP Select and be part of the Highlights of 2008.
[58].
C.M. Bingham, H. Tao, X. Liu, R.D. Averitt, X. Zhang, and W.J. Padilla,
"Planar Wallpaper Group Metamaterials for Novel Terahertz Applications,"
Optics Express, 2008, 16(23): 18565-18575. [DOI;
PDF]
Highlighted by Nature
in Vol. 456, 6 November 2008
[PDF]
and MRS Bulletin
in Vol. 34, January 2009
[PDF]
[57].
X. Zheng and X. Zhang,
"Optical Moire as a Visualization Tool for Living Vascular Cell Contraction Force Mapping,"
Applied Physics Letters, 2008, 93(16): 164106(3pp). [DOI;
PDF]
Selected for Virtual Journal of Biological Physics Research - Vol. 16, Issue 9, November 2008.
[56].
Y. Liu, I-K Lin, and X. Zhang,
"Mechanical Properties of Sputtered Silicon Oxynitride Films by Nanoindentation,"
Materials Science and Engineering A, 2008, 489(1-2): 294-301. [DOI;
PDF]
[55].
S. Huang, H. Tao, I-K Lin, and X. Zhang,
"Development of Double-Cantilever Infrared Detectors: Fabrication, Curvature Control and Demonstration of Thermal Detection,"
Sensors and Actuators A: Physical, 2008, 145-146: 231-240. [DOI;
PDF]
[54].
I-K Lin, Y. Zhang, and X. Zhang,
"The Deformation of Microcantilever-Based Infrared Detectors During Thermal Cycling,"
Journal of Micromechanics and Microengineering, 2008, 18(7): 075012(9pp). [DOI;
PDF]
[53].
H. Tao, N.I. Landy, C.M. Bingham, X. Zhang, R.D. Averitt, and W.J. Padilla,
"A Metamaterial Absorber for the Terahertz Regime: Design, Fabrication and Characterization,"
Optics Express, 2008, 16(10): 7181-7188. [DOI;
PDF]
Highlighted by Nature
in Vol. 453, 12 June 2008
[PDF]
and Science
in Vol. 320, 6 June 2008
[PDF]
[52].
Z. Cao and X. Zhang,
"Nanoindentation Stress-Strain Curves of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films,"
Thin Solid Films, 2008, 516(8): 1941-1951. [DOI;
PDF]
[51].
Y. Qiu, R. Liao, and X. Zhang,
"Real-Time Monitoring Primary Cardiomyocyte Adhesion Based on Electrochemical Impedance Spectroscopy and Electrical Cell-Substrate Impedance Sensing,"
Analytical Chemistry, 2008, 80(4): 990-996. [DOI;
PDF]
[50].
Y. Zhao and X. Zhang,
"Profile Control in Silicon Nanostructures Using Fluorine-Enhanced Oxide Passivation,"
IEEE Transactions on Nanotechnology, 2008, 7(1): 40-47. [DOI;
PDF]
[49].
Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang,
"Simultaneous Orientation and Cellular Force Measurements in Adult Cardiac Myocytes Using Three-Dimensional Polymeric Microstructures,"
Cell Motility and the Cytoskeleton, 2007, 64(9): 718-725. [DOI;
PDF]
[48].
S. Huang and X. Zhang,
"Study of Gradient Stress in Bimaterial Cantilever Structures for Infrared Applications,"
Journal of Micromechanics and Microengineering, 2007, 17(7): 1211-1219. [DOI;
PDF]
[47].
M. Yang and X. Zhang,
"A Novel Impedance Assay for Cardiac Myocyte Hypertrophy Sensing,"
Sensors and Actuators A: Physical, 2007, 136(2): 504-509. [DOI;
PDF]
[46].
Y. Zhao and X. Zhang,
"Adaptation of Myofibrils to a Microstructured Polymeric Substrate,"
Sensors and Actuators A: Physical, 2007, 136(2): 491-495. [DOI;
PDF]
[45].
M. Yang and X. Zhang,
"Electrical Assisted Patterning of Cardiac Myocytes with Controlled Macroscopic Anisotropy Using a Microfluidic Dielectrophoresis Chip,"
Sensors and Actuators A: Physical, 2007, 135(1): 73-79. [DOI;
PDF]
[44].
M. Yang, C.C. Lim, R. Liao, and X. Zhang,
"A Novel Microfluidic Impedance Assay for Monitoring Endothelin-Induced Cardiomyocyte Hypertrophy,"
Biosensors and Bioelectronics, 2007, 22(8): 1688-1693. [DOI;
PDF]
[43].
S. Huang and X. Zhang,
"Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures,"
Sensors and Actuators A: Physical, 2007, 134(1): 177-185. [DOI;
PDF]
[42].
Z. Cao and X. Zhang,
"Nanoindentation Creep of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films,"
Scripta Materialia, 2007, 56(3): 249-252. [DOI;
PDF]
[41].
M. Yang, C.C. Lim, R. Liao, and X. Zhang,
"Oriented and Vectorial Patterning of Cardiac Myocytes Using a Microfluidic Dielectrophoresis Chip - Towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy,"
Journal of Microelectromechanical Systems, 2006, 15(6): 1483-1491. [DOI;
PDF]
[40].
Z. Cao and X. Zhang,
"Size-Dependent Creep Behavior of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films,"
Journal of Physics D: Applied Physics, 2006, 39(23): 5054-5063. [DOI;
PDF]
[39].
Y. Zhao and X. Zhang,
"Determination of the Deformations in Polymeric Nanostructures Using Geometric Moire Techniques for
Biological Applications,"
Sensors and Actuators B: Chemical, 2006, 117(2): 376-383. [DOI;
PDF]
[38].
S. Huang, B. Li, and X. Zhang,
"Elimination of Stress-Induced Curvature in Microcantilever Infrared Focal Plane Arrays,"
Sensors and Actuators A: Physical, 2006, 130-131: 331-339. [DOI;
PDF]
[37].
Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang,
"Microchip for Subcellular Mechanics Study in Living Cells,"
Sensors and Actuators B: Chemical, 2006, 114(2): 1108-1115. [DOI;
PDF]
[36].
Y. Zhao and X. Zhang,
"An Approach for Creating Polymeric Microstructures with Various Aspect Ratios for Cellular Analysis Applications,"
Sensors and Actuators A: Physical, 2006, 127(2): 216-220. [DOI;
PDF]
[35].
H. Yu, O. Balogun, B. Li, T.W. Murray, and X. Zhang,
"Fabrication of Three-Dimensional Microstructures Based on Singled-Layered SU-8 for Lab-on-Chip Applications,"
Sensors and Actuators A: Physical, 2006, 127(2): 228-234. [DOI;
PDF]
[34].
Z. Cao and X. Zhang,
"Experiments and Theory of Thermally-Induced Stress Relaxation in Amorphous Dielectric Films for MEMS and IC Applications,"
Sensors and Actuators A: Physical, 2006, 127(2): 221-227. [DOI;
PDF]
[33].
S. Huang and X. Zhang,
"Extension of the Stoney Formula for Film-Substrate Systems with Gradient Stress for MEMS Applications,"
Journal of Micromechanics and Microengineering, 2006, 16(2): 382-389. [DOI;
PDF]
[32].
Y. Zhao and X. Zhang,
"Cellular Mechanics Study in Cardiac Myocytes Using PDMS Pillars Array,"
Sensors and Actuators A: Physical, 2006, 125(2): 398-404. [DOI;
PDF]
[31].
H. Yu, B. Li, and X. Zhang,
"Flexible Fabrication of Three-Dimensional Multi-Layered Microstructures Using a Scanning Laser System,"
Sensors and Actuators A: Physical, 2006, 125(2): 553-564. [DOI;
PDF]
[30].
Y. Zhao and X. Zhang,
"Adaptation of Flexible Polymer Fabrication to Cellular Mechanics Study,"
Applied Physics Letters, 2005, 87(14): 144101(3pp). [DOI;
PDF]
Selected for Virtual Journal of Biological Physics Research - Vol. 10, Issue 7, October 2005.
[29].
Y. Zhao, C.C. Lim, D.B. Sawyer, R. Liao, and X. Zhang,
"Cellular Force Measurements Using Single-Spaced Polymeric Microstructures: Isolating Cells from Base Substrate,"
Journal of Micromechanics and Microengineering, 2005, 15(9): 1649-1656. [DOI;
PDF]
[28].
Z. Cao, T-Y Zhang, and X. Zhang,
"Microbridge Testing of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films on Silicon Wafers,"
Journal of Applied Physics, 2005, 97(10): 104909(9pp). [DOI;
PDF]
Selected for Virtual Journal of Nanoscale Science and Technology - Vol. 11, Issue 19, May 2005.
[27].
L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, and A.H. Epstein,
"High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings,"
Journal of Microelectromechanical Systems, 2005, 14(1): 141-152. [DOI;
PDF]
[26].
H. Yu, O. Balogun, B. Li, T.W. Murray, and X. Zhang,
"Building Embedded Microchannels Using a Single Layered SU-8, and Determining Young's Modulus Using a Laser Acoustic Technique,"
Journal of Micromechanics and Microengineering, 2004, 14(11): 1576-1584. [DOI;
PDF]
[25].
X. Zhang, Y. Zhao, B. Li, and D. Ludlow,
"Pumping Capacity and Reliability of Cryogenic Micro-pump for Micro-Satellite Applications,"
Journal of Micromechanics and Microengineering, 2004, 14(10): 1421-1429. [DOI;
PDF]
[24].
Z. Cao and X. Zhang,
"Density Change and Viscous Flow During Structural Relaxation of Plasma-Enhanced Chemical-Vapor-Deposited Silicon Oxide Films,"
Journal of Applied Physics, 2004, 96(8): 4273-4279. [DOI;
PDF]
[23].
B. Li, H. Yu, A. Sharon, and X. Zhang,
"Rapid Three Dimensional Manufacturing of Microfluidic Structures Using a Scanning Laser System,"
Applied Physics Letters, 2004, 85(12): 2426-2428. [DOI;
PDF]
Selected for Virtual Journal of Nanoscale Science and Technology - Vol. 10, Issue 15, October 2004.
[22].
C.W. Wong, X. Zhang, S.A. Jacobson, and A.H. Epstein,
"A Self-Acting Gas Thrust Bearing for High-Speed Microrotors,"
Journal of Microelectromechanical Systems, 2004, 13(2): 158-164. [DOI;
PDF]
[21].
B. Li, X. Tang, H. Xie, and X. Zhang,
"Strain Analysis in MEMS/NEMS Structures and Devices by Using Focused Ion Beam System,"
Sensors and Actuators A: Physical, 2004, 111(1): 57-62. [DOI;
PDF]
[20].
C.M. Spadaccini, A. Mehra, J. Lee, X. Zhang, S. Lukachko, and I.A. Waitz,
"High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines,"
Journal of Engineering for Gas Turbines and Power, 2003, 125(3): 709-719. [DOI;
PDF]
[19].
K-S Chen, X. Zhang, and S-Y Lin,
"Intrinsic Stress Generation and Relaxation of Plasma-Enhanced Chemical Vapor Deposited Oxide During Deposition and Subsequent Thermal Cycling,"
Thin Solid Films, 2003, 434(1-2): 190-202. [DOI;
PDF]
[18].
N. Miki, C.J. Teo, L. Ho, and X. Zhang,
"Enhancement of Rotordynamic Performance of High-Speed Micro-Rotors for Power MEMS Applications by Precision Deep Reactive Ion Etching,"
Sensors and Actuators A: Physical, 2003, 104(3): 263-267. [DOI;
PDF]
[17].
X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz,
"Igniters and Temperature Sensors for a Micro-Scale Combustion System,"
Sensors and Actuators A: Physical, 2003, 103(1-2): 253-262. [DOI;
PDF]
[16].
X. Zhang, K-S Chen, and S.M. Spearing,
"Thermo-Mechanical Behavior of Thick PECVD Oxide Films for Power MEMS Applications,"
Sensors and Actuators A: Physical, 2003, 103(1-2): 263-270. [DOI;
PDF]
[15].
N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, and S.M. Spearing,
"Multi-Stack Silicon-Direct Wafer Bonding for 3D MEMS Manufacturing,"
Sensors and Actuators A: Physical, 2003, 103(1-2): 194-201. [DOI;
PDF]
[14].
A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing,
"Characterization of Silicon Wafer Bonding for Power MEMS Applications,"
Sensors and Actuators A: Physical, 2003, 103(1-2): 1-8. [DOI;
PDF]
[13].
C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, and I.A. Waitz,
"Preliminary Development of a Hydrocarbon-Fueled Catalytic Micro-Combustor,"
Sensors and Actuators A: Physical, 2003, 103(1-2): 219-224. [DOI;
PDF]
[12].
K-S Chen, A.A. Ayon, X. Zhang, and S.M. Spearing,
"Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures after Deep Reactive Ion Etching (DRIE),"
Journal of Microelectromechanical Systems, 2002, 11(3): 264-275. [DOI;
PDF]
[11].
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X. Zhang, K-S Chen, R. Ghodssi, A.A. Ayon, and S.M. Spearing,
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A. Mehra, X. Zhang, A.A. Ayon, I.A. Waitz, M.A. Schmidt, and C.M. Spadaccini,
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L-Q Chen, X. Zhang, T-Y Zhang, H.Y. Lin, and S.B. Lee,
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PDF]
[4].
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[2].
G.L. Chen, X.T. Wang, K.Q. Ni, S.M. Hao, J.X. Cao, J.J. Ding, and X. Zhang,
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PDF]
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PDF]
