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MEMS 'XX
(MEMS 'XX: IEEE International Conference on Micro Electro Mechanical Systems, Annual Conference; Hilton Head 'XX: IEEE Solid-State Sensors, Actuators and Microsystems Workshop, Biennial Conference; Transducers 'XX: International Conference on Solid-State Sensors, Actuators and Microsystems, Biennial Conference)

[69]. G. Duan, J. Schalch, X. Zhao, J. Zhang, R.D. Averitt, and X. Zhang, "An Air-Spacer Terahertz Metamaterial Perfect Absorber for Sensing and Detection Applications," Proceeding of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '17), Kaohsiung, Taiwan, June 18-22, 2017, pp. 1999-2002.

[68]. X. Zhao, M. Wu, J. Zhang, J. Schalch, K. Cremin, R.D. Averitt, and X. Zhang, "A High-Q Three-Dimensional Terahertz Metamaterial Perfect Absorber," Proceeding of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '17), Kaohsiung, Taiwan, June 18-22, 2017, pp. 1971-1974.

[67]. A. Li, M. Moges, J. Morales, A. Saccoccio, S.W. Anderson, and X. Zhang, "Facile Assembling Method for Coscinodiscus sp. Diatom Frustule Monolayers towards Controlled Orientations," Proceeding of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '17), Kaohsiung, Taiwan, June 18-22, 2017, pp. 1742-1745.

[66]. X. Zhao, J. Schalch, J. Zhang, H.R. Seren, G. Duan, R.D. Averitt, and X. Zhang, "A Tunable Terahertz Metamaterial Based on A Micro-Cantilever Array," Proceeding of the 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '17), Las Vegas, NV, USA, January 22-26, 2017, pp. 970-973.

[65]. X. Zhao, J. Zhang, K. Fan, G.R. Keiser, G. Duan, R.D. Averitt, and X. Zhang, "A Comb-Drive Actuator Enabled Dynamically Tunable Terahertz Metamaterial," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '16), Hilton Head Island, SC, USA, June 5-9, 2016, pp. 214-217.

[64]. A. Li, W. Zhang, R. Ghaffarivardavagh, X. Wang, S.W. Anderson, and X. Zhang, "Large-Area Diatom Frustule Self-Assembled Monolayers: Formation and Manipulation," Proceeding of the 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '16), Shanghai, China, January 24-28, 2016, pp. 539-542.

[63]. X. Zhao, J. Zhang, K. Fan, H.R. Seren, R.D. Averitt, and X. Zhang, "Terahertz Field Detector Based on Electron Emission," Proceeding of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '15), Anchorage, AK, USA, June 21-25, 2015, pp. 2085-2088.

[62]. F. Zhang, D.H. Ren, Z. You, S.W. Anderson, and X. Zhang, "Neonatal Rat Ventricular Myocytes Force Mapping Using Double-Sided Micropillar Arrays," Proceeding of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '15), Anchorage, AK, USA, June 21-25, 2015, pp. 371-374.

[61]. X. Zhao, K. Fan, G.R. Keiser, H.R. Seren, R.D. Averitt, and X. Zhang, "A Real-Time Tunable Terahertz Metamaterial Based on Broadside-Coupled Split Ring Resonators," Proceeding of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '15), Anchorage, AK, USA, June 21-25, 2015, pp. 315-318.

[60]. X. Zhao, K. Fan, J. Zhang, G.R. Keiser, H.R. Seren, R.D. Averitt, and X. Zhang, "Micromachined Broadside-Coupled Tunable Metamaterials," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '14), Hilton Head Island, SC, USA, June 8-12, 2014, pp. 375-378.

[59]. J. Cai, S.W. Anderson, X. Wang, and X. Zhang, "Biologically Enabled Micro- and Nanostencil Lithography Using Diatoms," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '14), Hilton Head Island, SC, USA, June 8-12, 2014, pp. 183-186.

[58]. F. Zhang, S.W. Anderson, X. Zheng, Y. Qiu, R. Liao, and X. Zhang, "Double-Sided Micropillar Arrays for Cell Contraction Force Mapping Using Optical Moire Method," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '14), Hilton Head Island, SC, USA, June 8-12, 2014, pp. 155-158.

[57]. X. Zhao, K. Fan, J. Zhang, H.R. Seren, G.D. Metcalfe, R.D. Averitt, and X. Zhang, "Design, Fabrication and Characterization of Tunable Perfect Absorber on Flexible Substrate," Proceeding of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '14), San Francisco, CA, USA, January 26-30, 2014, pp. 84-87.

[56]. C. Wang, X. Wang, S.W. Anderson, and X. Zhang, "Fabrication and Characterization of Composite Hydrogel Particles with X-Ray Attenuating Media," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 2221-2224.

[55]. C. Wang, X. Wang, S.W. Anderson, and X. Zhang, "Biocompatible Microfabricated Magnetic Cylinders as Contrast Agents for Magnetic Resonance Imaging," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 120-123.

[54]. X. Wang, C. Wang, S.W. Anderson, and X. Zhang, "Fabrication of Hydrogel Particles with Tantalum Oxide Nanoparticle Payloads as Computed Tomography Contrast Agents," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 426-429.

[53]. X. Wang, C. Wang, S.W. Anderson, and X. Zhang, "Characterization of Reactively Sputtered Iron Oxide Thin Films for Developing Magnetic Resonance Imaging Contrast Agents," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 2403-2406.

[52]. H.R. Seren, C. Wang, X. Zhao, C. Chen, and X. Zhang, "A Microfluidic Read-Out Platform for Miniaturized RFID Tags," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 2716-2719.

[51]. H.R. Seren, A.C. Strikwerda, L. Cao, G.R. Keiser, J. Zhang, K. Fan, G.D. Metcalfe, M. Wraback, R.D. Averitt, and X. Zhang, "An Optically Tunable Terahertz Perfect Absorber," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 1428-1431.

[50]. K. Fan, X. Zhao, J. Zhang, G.D. Metcalfe, R.D. Averitt, and X. Zhang, "Flexible and Tunable Metamaterials at Terahertz Frequencies," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 2225-2228.

[49]. P. Du, X. Lin, and X. Zhang, "Tunable Dielectric Constants and Mechanical Properties of PDMS by Conducting Polymer Nanowire Composites," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 434-437.

[48]. P. Du, C. Chen, H. Lu, and X. Zhang, "Extracting Viscoelastic Properties of Soft Polymers from Dynamic Nanoindentation Using an Improved Model," Proceeding of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '13), Barcelona, Spain, June 16-20, 2013, pp. 1063-1066.

[47]. H. Tao, E.A. Kadlec, A.C. Strikwerda, K. Fan, W.J. Padilla, R.D. Averitt, E.A. Shaner, and X. Zhang, "MEMS and Metamaterial-Based Terahertz Detector," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '12), Hilton Head Island, SC, USA, June 3-7, 2012, pp. 320-323.

[46]. P. Du, X. Lin, and X. Zhang, "Dielectric Constants of PDMS Nanocomposites by Conducting Polymer Nanowires," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 645-648.

[45]. K. Fan, A.C. Strikwerda, R.D. Averitt, and X. Zhang, ""Bottom-Up" Three-Dimensional Metamaterials at Terahertz Frequencies," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 2662-2665.

[44]. P. Du, X. Lin, and X. Zhang, "Electromechanical Coupling of Polypyrrole Trilayer Actuators," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 478-481.

[43]. X. Zheng and X. Zhang, "Polymer Opto-Mechanical Transducer for Abnormal Cell Contraction Diagnostics," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 2243-2246.

[42]. P. Du, X. Zheng, I-K Lin, H. Lu, and X. Zhang, "Effect of Loading Rates on Polymer Micropillar-Based Force Transducers," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 1432-1435.

[41]. X. Wang, S.W. Anderson, and X. Zhang, "Microengineered Iron and Iron-Oxide Contrast Agent Particles for Tunable Multispectral Magnetic Resonance Imaging," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 2152-2155.

[40]. B.C. Kaanta, H. Chen, and X. Zhang, "Flow Rate Insensitive Thermal Conductivity Detector for Micro Gas Chromatography," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 2074-2077.

[39]. B.C. Kaanta, A. Jonca, H. Chen, and X. Zhang, "Effect of Knudsen Number on Maximum Response of a Thermal Conductivity Detector," Proceeding of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11), Beijing, China, June 5-9, 2011, pp. 88-91.

[38]. K. Fan, A.C. Strikwerda, H. Tao, R.D. Averitt, and X. Zhang, "Broadband Tunable 3D Metamaterials at Terahertz Frequencies," Proceeding of the 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '11), Cancun, Mexico, January 23-27, 2011, pp. 680-683.

[37]. X. Zheng, H.K. Surks, and X. Zhang, "Sensing Single Cell Contractility Utilizing Moire Fringes," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '10), Hilton Head Island, SC, USA, June 6-10, 2010, pp. 274-277.

[36]. B.C. Kaanta, H. Chen, and X. Zhang, "Flow Rate Insensitive Thermal Conductivity Detector," Technical Digest of IEEE Sensors, Actuators and Microsystems Workshop (Hilton Head '10), Hilton Head Island, SC, USA, June 6-10, 2010, pp. 294-297.

[35]. H. Tao, J.J. Amsden, A.C. Strikwerda, K. Fan, D.L. Kaplan, F.G. Omenetto, R.D. Averitt, and X. Zhang, "Large Area Spraying of Terahertz Metamaterials on Free-Standing Biocompatible Silk Films," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '10), Hilton Head Island, SC, USA, June 6-10, 2010, pp. 138-141.

[34]. K. Fan, A.C. Strikwerda, H. Tao, W.J.Padilla, R.D. Averitt, and X. Zhang, "3D Stand-up Metamaterials with Purely Magnetic Resonance at Terahertz Frequencies," Proceeding of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), Hong Kong, China, January 24-28, 2010, pp. 843-846.

[33]. B.C. Kaanta, H. Chen, and X. Zhang, "Monolithic Micro Gas Chromatographic Separation Column and Detector," Proceeding of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '10), Hong Kong, China, January 24-28, 2010, pp. 907-910.

[32]. Y. Qiu, R. Liao, and X. Zhang, "Preventing Cardiomyocytes from TNF-Alpha-Induced Cell Death Based on Real-Time Monitoring Cell Adhesion through Impedance Sensors," Proceeding of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09), Denver, CO, USA, June 21-25, 2009, pp. 65-68.

[31]. H. Tao, N.I. Landy, K. Fan, A.C. Strikwerda, W.J. Padilla, R.D. Averitt, and X. Zhang, "Terahertz Metamaterials with Simultaneously Negative Electric and Magnetic Resonance Responses Based on Bimaterial Pop up Structures," Proceeding of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), Sorrento, Italy, January 25-29, 2009, pp. 108-111.

[30]. B.C. Kaanta, H. Chen, G. Lambertus, W.H. Steinecker, O. Zhdaneev, X. Zhang, "High Sensitivity Micro-Thermal Conductivity Detector for Gas Chromatography," Proceeding of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09), Sorrento, Italy, January 25-29, 2009, pp. 264-267.

[29]. H. Tao, C.M. Bingham, A.C. Strikwerda, K. Fan, W.J. Padilla, R.D. Averitt, and X. Zhang, "MEMS and Metamaterials: A Perfect Marriage at Terahertz Frequencies," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '08), Hilton Head Island, SC, USA, June 1-5, 2008, pp. 54-55.

[28]. X. Zheng and X. Zhang, "A MEMS Based Optical Moire Approach for in situ Cardiac Myocyte Force Probing," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 1119-1122.

[27]. Y. Qiu, R. Liao, and X. Zhang, "Electrochemical Impedance Spectroscopy of the Cardiomyocyte Adhesion to Extracellular Matrix on Micro-Fabricated Biosensors," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 827-830.

[26]. S. Huang, I-K Lin, H. Tao, and X. Zhang, "Double-Cantilever Infrared Detector: Fabrication, Curvature Control and Demonstration of Thermal Detection," Proceeding of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 10-14, 2007, pp. 1601-1604.

[25]. Y. Zhao and X. Zhang, "Directional Reassembly of Myofibrils in Cultured Cardiac Myocytes Using a Three-Dimensional Polymeric Substrate," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '06), Hilton Head Island, SC, USA, June 4-8, 2006, pp. 410-411.

[24]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "Impedance Based Biosensor with Dielectrophoresis Concentration for Cardiac Myocyte Hypertrophy Sensing," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '06), Hilton Head Island, SC, USA, June 4-8, 2006, pp. 177-180.

[23]. M. Yang, C.C. Lim, R. Liao, and X. Zhang, "Oriented and Vectorial Patterning of Cardiac Myocyte Using a Microfluidic Dielectrophoresis Chip - Towards Engineered Cardiac Tissue with Controlled Macroscopic Anisotropy," Proceeding of the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '06), Istanbul, Turkey, January 22-26, 2006, pp. 8-11.

[22]. Y. Zhao, F. Li, and X. Zhang, "Determination of Deformations in Polymeric Nanostructures Using Geometric Moire Techniques for Biological Applications," Proceeding of the 13th International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers '05), Seoul, Korea, June 5-9, 2005, pp. 1748-1751.

[21]. S. Huang, B. Li, and X. Zhang, "Elimination of Stress-Induced Curvature in Microbolometer Focal Plane Arrays," Proceeding of the 13th International Conference on Solid-State Sensors and Actuators and Microsystems (Transducers '05), Seoul, Korea, June 5-9, 2005, pp. 820-823.

[20]. Y. Zhao, H. Yu, and X. Zhang, "Creating Polymer-Based Microstructures with Various Aspect Ratios from a Single Template for Cellular Force Measurements," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 496-499.

[19]. Y. Zhao and X. Zhang, "Contraction Force Measurements in Cardiac Myocytes Using PDMS Pillar Arrays," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 834-837.

[18]. Z. Cao and X. Zhang, "Mechanism of Temperature-Induced Plastic Deformation of Amorphous Dielectric Films for MEMS Applications," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 471-474.

[17]. H. Yu, O. Balogun, B. Li, T. Murray, and X. Zhang, "Rapid Manufacturing of Embedded Microchannels from a Single Layered SU-8 and Determining the Dependence of SU-8 Young's Modulus on Exposure Dose with a Laser Acoustic Technique," Proceeding of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05), Miami Beach, FL, USA, January 30 - February 3, 2005, pp. 654-657.

[16]. Y. Zhao, H. Yu, B. Li, and X. Zhang, "Micro Molded PDMS Structures for Cardiac Myocyte Restoring Force Measurements," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, USA, June 6-10, 2004, pp. 394-395.

[15]. B. Li, X. Tang, H. Xie, and X. Zhang, "Focused Ion Beam (FIB) Nano-Machining and FIB Moire Technique for Strain Analysis in MEMS/NEMS Structures and Devices," Proceeding of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan, January 19-23, 2003, pp. 674-677.

[14]. A. Sharon, A. Bilsing, G. Lewis, and X. Zhang, "Manufacturing of 3D Microstructures Using Novel UPSAMS Process (Ultra Precision Manufacturing of Self-Assembled Micro Systems)," Proceeding of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '03), Kyoto, Japan, January 19-23, 2003, pp. 542-545.

[13]. N. Miki, C.J. Teo, L. Ho, and X. Zhang, "Precision Fabrication of High-Speed Micro-Rotors Using Deep Reactive Ion Etching (DRIE)," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '02), Hilton Head Island, SC, USA, June 2-6, 2002, pp. 265-268.

[12]. N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, and S.M. Spearing, "A Study of Multi-Stack Silicon-Direct Wafer Bonding for MEMS Manufacturing," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 407-410.

[11]. X. Zhang, K-S Chen, and S.M. Spearing, "Residual Stress and Fracture of Thick Dielectric Films for Power MEMS Applications," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 164-167.

[10]. C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, and I.A. Waitz, "Development of a Catalytic Silicon Micro-Combustor for Hydrocarbon-Fueled Power MEMS," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 228-231.

[9]. X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz, "Development of Polysilicon Igniters and Temperature Sensors for a Micro Gas Turbine Engine," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 280-283.

[8]. A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing, "Low Temperature Silicon Wafer Bonding for MEMS Applications," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 411-414.

[7]. C.W. Wong, X. Zhang, S.A. Jacobson, and A.H. Epstein, "A Self-Acting Thrust Bearing for High-Speed Micro-Rotors," Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), Las Vegas, NV, USA, January 20-24, 2002, pp. 276-279.

[6]. S. Sullivan, X. Zhang, A.A. Ayon, and J.G. Brisson, "Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine," Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 10-14, 2001, pp. 1606-1609.

[5]. X. Zhang, R. Ghodssi, K-S Chen, A.A. Ayon, and S.M. Spearing, "Residual Stress Characterization of Thick PECVD TEOS Film for Power MEMS Applications," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-8, 2000, pp. 316-319.

[4]. A.A. Ayon, X. Zhang, and R. Khanna, "Ultra Deep Anisotropic Silicon Trenches Using Deep Reactive Ion Etching (DRIE)," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-8, 2000, pp. 339-342.

[3]. L.G. Frechette, S.A. Jacobson, K.S. Breuer, F.F. Ehrich, R. Ghodssi, R. Khanna, C.W. Wong, X. Zhang, M.A. Schmidt, and A.H. Epstein, "Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings," Technical Digest of IEEE Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head '00), Hilton Head Island, SC, USA, June 4-8, 2000, pp. 43-47.

[2]. R. Ghodssi, L.G. Frechette, S.F. Nagle, X. Zhang, A.A. Ayon, S.D. Senturia, and M.A. Schmidt, "Thick Buried Oxide in Silicon (TBOS): An Integrated Fabrication Technology for Multi-Stack Wafer-Bonded MEMS Processes," Technical Digest of the 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June 7-10, 1999, pp. 1456-1459.

[1]. X. Zhang, T-Y Zhang, M. Wong, and Y. Zohar, "Effects of High-Temperature Rapid Thermal Annealing on the Residual Stress of LPCVD-Polysilicon Thin Films," Proceeding of the 10th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, January 26-30, 1997, pp. 535-540.

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