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Year 2003

Archival Journal Papers (#denotes graduate students/postdocs supervised by X. Zhang; *denotes corresponding author by X. Zhang; +denotes contributed equally.)

High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines,
C.M. Spadaccini, A. Mehra, J. Lee, X. Zhang, S. Lukachko, I.A. Waitz, Journal of Engineering for Gas Turbines and Power, 2003, 125(3): 709-719. [DOI]

Intrinsic Stress Generation and Relaxation of Plasma-Enhanced Chemical Vapor Deposited Oxide during Deposition and Subsequent Thermal Cycling,
K-S Chen, X. Zhang, S-Y Lin, Thin Solid Films, 2003, 434(1-2): 190-202. [DOI]

Enhancement of Rotordynamic Performance of High-Speed Micro-Rotors for Power MEMS Applications by Precision Deep Reactive Ion Etching,
N. Miki, C.J. Teo, L. Ho, X. Zhang, Sensors and Actuators A: Physical, 2003, 104(3): 263-267. [DOI]

Igniters and Temperature Sensors for a Micro-Scale Combustion System,
X. Zhang, A. Mehra, A.A. Ayon, I.A. Waitz, Sensors and Actuators A: Physical, 2003, 103(1-2): 253-262. [DOI]

Thermo-Mechanical Behavior of Thick PECVD Oxide Films for Power MEMS Applications,
X. Zhang, K-S Chen, S.M. Spearing, Sensors and Actuators A: Physical, 2003, 103(1-2): 263-270. [DOI]

Characterization of Silicon Wafer Bonding for Power MEMS Applications,
A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, S.M. Spearing, Sensors and Actuators A: Physical, 2003, 103(1-2): 1-8. [DOI]

Multi-Stack Silicon-Direct Wafer Bonding for 3D MEMS Manufacturing,
N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, S.M. Spearing, Sensors and Actuators A: Physical, 2003, 103(1-2): 194-201. [DOI]

Preliminary Development of a Hydrocarbon-Fueled Catalytic Micro-Combustor,
C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, I.A. Waitz, Sensors and Actuators A: Physical, 2003, 103(1-2): 219-224. [DOI]

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