Archival Journal Papers
Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures after Deep Reactive Ion Etching (DRIE),
K-S Chen, A.A. Ayon, X. Zhang, and S.M. Spearing,
Journal of Microelectromechanical Systems, 11 (3) (2002) 264-275. doi: 10.1109/JMEMS.2002.1007405
[Link]
Conference Proceeding Papers
Focused Ion Beam Nano-Machined Structures for Strain Analysis by a Moire Technique,
B. Li, X. Tang, H. Xie, and X. Zhang,
Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines,
Mater. Res. Soc. Symp. Proc., 741 (2002) J8.4.
Manufacturing of 3D Microstructures Using Novel UPSAMS Process for MEMS Applications,
A. Sharon, A. Bilsing, G. Lewis, and X. Zhang,
Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines,
Mater. Res. Soc. Symp. Proc., 741 (2002) J5.30.
Precision Fabrication of High-Speed Micro-Rotors Using Deep Reactive Ion Etching (DRIE),
N. Miki, C.J. Teo, L. Ho, and X. Zhang,
Technical Digest of IEEE Solid-State Sensor and Actuator Workshop (Hilton Head '02),
Hilton Head Island, SC, USA, June 2-6, 2002, pp. 265-268.
High Power Density Silicon Combustion Systems for Micro Gas Turbine Engines,
C.M. Spadaccini, A. Mehra, J. Lee, S. Lukachko, X. Zhang, and I.A. Waitz,
Proceedings of ASME TURBO EXPO, 2002 - Land, Sea & Air,
Amsterdam, The Netherlands, June 2-6, 2002, GT-2002-30082.
A Study of Multi-Stack Silicon-Direct Wafer Bonding for MEMS Manufacturing,
N. Miki, X. Zhang, R. Khanna, A.A. Ayon, D. Ward, and S.M. Spearing,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 407-410.
Residual Stress and Fracture of Thick Dielectric Films for Power MEMS Applications,
X. Zhang, K-S Chen, and S.M. Spearing,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 164-167.
Development of a Catalytic Silicon Micro-Combustor for Hydrocarbon-Fueled Power MEMS,
C.M. Spadaccini, X. Zhang, C.P. Cadou, N. Miki, and I.A. Waitz,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 228-231.
Development of Polysilicon Igniters and Temperature Sensors for a Micro Gas Turbine Engine,
X. Zhang, A. Mehra, A.A. Ayon, and I.A. Waitz,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 280-283.
Low Temperature Silicon Wafer Bonding for MEMS Applications,
A.A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 411-414.
A Self-Acting Thrust Bearing for High-Speed Micro-Rotors,
C.W. Wong, X. Zhang, S.A. Jacobson, and A.H. Epstein,
Proceeding of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02),
Las Vegas, NV, USA, January 20-24, 2002, pp. 276-279.
