>> Zhang Lab: Publications (homepage)

2002 and earlier

Archival Journal Papers (#denotes graduate students/postdocs supervised by X. Zhang; *denotes corresponding author by X. Zhang; +denotes contributed equally.)

Effect of Process Parameters on the Surface Morphology and Mechanical Performance of Silicon Structures after Deep Reactive Ion Etching (DRIE),
K-S Chen, A.A. Ayon, X. Zhang, S.M. Spearing, Journal of Microelectromechanical Systems, 2002, 11(3): 264-275. [DOI]

Residual Stress and Fracture in Thick Tetraethylorthosilicate (TEOS) and Silane-Based PECVD Oxide Films,
X. Zhang, K-S Chen, R. Ghodssi, A.A. Ayon, S.M. Spearing, Sensors and Actuators A: Physical, 2001, 91(3): 373-380. [DOI]

Anisotropic Silicon Trenches 300-500 um Deep Employing Time Multiplexed Deep Etching (TMDE),
A.A. Ayon, X. Zhang, R. Khanna, Sensors and Actuators A: Physical, 2001, 91(3): 381-385. [DOI]

A Six-Wafer Combustion System for a Silicon Micro Gas Turbine Engine,
A. Mehra, X. Zhang, A.A. Ayon, I.A. Waitz, M.A. Schmidt, C.M. Spadaccini, Journal of Microelectromechanical Systems, 2000, 9(4): 517-527. [DOI]

Through-Wafer Electrical Interconnect for Multilevel Microelectromechanical System Devices,
A. Mehra, X. Zhang, A.A. Ayon, I.A. Waitz, M.A. Schmidt, Journal of Vacuum Science & Technology B, 2000, 18(5): 2583-2589. [DOI]

Micro-Raman Spectral Analysis of the Subsurface Damage Layer in Machined Silicon Wafers,
L-Q Chen, X. Zhang, T-Y Zhang, H.Y. Lin, S.B. Lee, Journal of Materials Research, 2000, 15(7): 1441-1444. [DOI]

Rapid Thermal Annealing of Polysilicon Thin Films,
X. Zhang, T-Y Zhang, M. Wong, Y. Zohar, Journal of Microelectromechanical Systems, 1998, 7(4): 356-364. [DOI]

Measurements of Residual Stresses in Thin Films Using Micro-Rotating-Structures,
X. Zhang, T-Y Zhang, Y. Zohar, Thin Solid Films, 1998, 335(1-2): 97-105. [DOI]

Buckling of Polysilicon Microbeams During Sacrificial Layer Removal,
T-Y Zhang, X. Zhang, Y. Zohar, Journal of Micromechanics and Microengineering, 1998, 8(3): 243-249. [DOI]

Residual-Stress Relaxation in Polysilicon Thin Films by High-Temperature Rapid Thermal Annealing,
X. Zhang, T-Y Zhang, M. Wong, Y. Zohar, Sensors and Actuators A: Physical, 1998, 64(1): 109-115. [DOI]

Investigation on the 1000, 1150 and 1400C Isothermal Section of the Ti-Al-Nb System,
G.L. Chen, X.T. Wang, K.Q. Ni, S.M. Hao, J.X. Cao, J.J. Ding, X. Zhang, Intermetallics, 1996, 4(1): 13-22. [DOI]

Calculation of Phase Equilibria for the Ternary System by the Grand Potential Method,
S.M. Hao and X. Zhang, Journal of Phase Equilibria, 1995, 16(5): 441-446. [DOI]

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