EK130 Micromachines

Many manmade devices for sensing and manipulating small objects are made using processes known collectively as micromachining, and the devices so-produced are micromachines. Air-bag crash sensors, tiny cell phone switches, inkjet printer heads are examples of such micromachines. In this course, the engineering challenges and physical principles behind micromachines will be explored in detail. Precision fabrication processes will be used in the lab to generate working micrometer-scale devices. Hands-on laboratory exercises in the Photonics Center's Precision Engineering Research Laboratory will include design, manufacture, and use of microscale systems.

Reference: M. Madou Fundamentals of Microfabrication, 2nd Ed.,CRC Press, ISBN: 0849308267


BOSTON UNIVERSITY Manufacturing Engineering		EK131/2 Introduction to Engineering: Micromachines
		Many manmade devices for sensing and manipulating small objects are made using processes known collectively as micromachining, and the devices so-produced are micromachines. Air-bag crash sensors, tiny cell phone switches, inkjet printer heads are examples of such micromachines. In this course, the engineering challenges and physical principles behind micromachines will be explored in detail. Precision fabrication processes will be used in the lab to generate working micrometer-scale devices. Hands-on laboratory exercises in the Photonics Center's Precision Engineering Research Laboratory will include design, manufacture, and use of microscale systems. Reference: M. Madou Fundamentals of Microfabrication, 2nd Ed.,CRC Press, ISBN: 0849308267
Location: PHOTONICS 901
Days / Times T/R 2-4,		Instructor Professor Bifano, copy all email to Ani Chaghatzbanian
Syllabus/Schedule/Grading	Lab Groups	LECTURE 1	Engineering at the microscale, microrobots, scaling laws
T. Bifano Homepage		LECTURE 2	Photolithography and Microelectromechanical Systems (MEMS)
		LECTURE 3	MEMS Processes
		LECTURE 4	Electrostatic actuation
		LECTURE 5	Photonics and MEMS deformable mirrors, adaptive optics 1
		LECTURE 6	Photonics and MEMS deformable mirrors, adaptive optics 2
HOMEWORK
1	Due 9/9

		LAB 1	Mask making and CAD, Room 902 PHO, 8 St. Mary's St
		LAB 2	Photolithography, Room 816, PHO
		LAB 3	Ion machining and wet etching, surface microscopy, Room 712 PHO
		LAB 4	Electrostatic actuation and light modulation, Room 712 PHO
		LAB 5	MEMS Deformable mirrors and adaptive optics, Room 712 PHO
		LAB 6	Scanning microscopy, Room B25 PHO
Boston University Photonics Center, 8 Saint Mary's Street, Boston, MA 02215