The
first eighteen non-planar Zernike polynomial shapes, produced
by BU deformable mirror (click
for larger image)
A
new class of silicon based deformable mirror (DM) has been
developed by Professor Thomas Bifano and his colleagues at
the Boston University Photonics Center. Prototype devices
have been fabricated as packaged micro-opto-electro-mechanical
systems (MOEMS), and are capable of correcting time-varying
aberrations in imaging or beam forming applications. Each
mirror is composed of a flexible silicon membrane supported
by an underlying array of electrostatic actuators. Structural
and electronic elements are fabricated using silicon surface
micromachining. µDM systems are now available commercially
at Boston Micromachines
Corporation.
