BU MEMS Hydrophone Helmholtz Resonator

The resonance frequency of a Helmholtz resonator that is etched into silicon. A sketch of the resonator is shown here. The cavity is filled with water and acts as an effective spring. The effective mass consists of a polysilicon mass plus the end effects associated with the mouth of the resonator.

The resonance frequency of this design as a function of resonator depth (z) is shown below. The width of the polysilicon mass is fixed at w=50 microns. The channel between the mass and the silicon wafer is either t=10, 20, or 30 microns.

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September 1999