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Spatial
Light Modulators (Segmented Deformable Mirrors)
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A new
class of spatial light modulator based on integration of CMOS
electronics and surface micromachined piston mirrors has been
devloped at Boston University, supported by DARPA through
the Coherent Communications, Imaging, and Targeting (CCIT)
program. The micromachined spatial light modulator (µSLM)
consists of an array of MEMS mirror segments fabricated in
aluminum or silicon over
a 10 mm square aperture. Each pixel is capable of altering
the phase of reflected light by up to one wavelength for visible
light. Aluminum µSLMs are integrated directly on CMOS
driver electronics, while silicon µSLMs are connected
by through-wafer vias (or wire-bonds) to driver electronics |
Recent
Publications
Lee,
H., Miller, M. H., and Bifano, T. G., "CMOS
chip planarization by chemical mechanical polishing for
a vertically stacked metal MEMS integration."
J. Micromech. Microeng., [14] 1, pp. 108-115, 2004
Dimas, C. E., Bifano, T. G., Bierden, P. A., Perreault,
J. A., Krulevitch, P. A. Roehnelt, R. T., and Cornelissen,
S. A., "Polysilicon
surface-micromachined spatial light modulator with novel
electronic integration," Proc. SPIE Vol. 4755,
p. 477-484, Design, Test, Integration, and Packaging of
MEMS/MOEMS 2002; Bernard Courtois, Jean Michel Karam,
Karen W. Markus, Bernd Michel, Tamal Mukherjee, James
A. Walker; Eds., Apr 2002
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Thomas Bifano, College of Engineering, Boston University, 8
St. Mary's St., Boston, MA 02215, (617) 353-8908, tgb@bu.edu |
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