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EK131-2, Introduction to Engineering: MICROMACHINES
Lectures
10/23 |
1 |
Engineering at the microscale, microrobots, scaling laws
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10/30 |
2 |
Lithography & Microelectromechanical Systems (MEMS)
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11/06 |
3 |
MEMS Electrostatic actuation 1
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11/18 |
4 |
MEMS Electrostatic actuation 2
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11/25 |
5 |
Photonics and MEMS deformable mirrors, adaptive optics
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12/04 |
6 |
Scanning microscopy and problem review
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Labs
10/28 |
1 |
Mask Making and CAD, Room 902 PHO |
11/04 |
2 |
Photolithography, Room 816, PHO
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11/13 |
3 |
Ion machining, surface microscopy, Room 712 PHO
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11/20 |
4 |
Electrostatic actuation, Room 712 PHO
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12/02 |
5 |
MEMS deformable mirrors, Room 712 PHO
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12/09 |
6 |
Scanning microscopy, Room B25 PHO
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Homework
Final Exam 12/11
Reference paper: Silicon as a mechanical material
Reference Paper: Infinitesimal machinery
Lab Groups
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Tuesday and Thursday 2-4pm, Grade: 30% HW, 30% Lab, 20% Exam, 20% Attendance. Labwork and HW due one week from assignment.
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Thomas Bifano, Director, Boston University Photonics Center
Room 936, 8 Saint Mary's Street, Boston, MA 02215
Tele: 617-353-8899, Email: tgb@bu.edu, Web: bifano.bu.edu |
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