EK131/2 Website
 
   
 

EK131-2, Introduction to Engineering: MICROMACHINES

Lectures

10/23

1

Engineering at the microscale, microrobots, scaling laws

10/30

2

Lithography & Microelectromechanical Systems (MEMS)

11/06

3

MEMS Electrostatic actuation 1

11/18

4

MEMS Electrostatic actuation 2

11/25

5

Photonics and MEMS deformable mirrors, adaptive optics

12/04

6

Scanning microscopy and problem review

Labs

10/28

1

Mask Making and CAD, Room 902 PHO
11/04

2

Photolithography, Room 816, PHO

11/13

3

Ion machining, surface microscopy, Room 712 PHO

11/20

4

Electrostatic actuation, Room 712 PHO

12/02

5

MEMS deformable mirrors, Room 712 PHO

12/09

6

Scanning microscopy, Room B25 PHO

 

Homework

1

Due 11/6

2

Due 11/18

3

Due 11/25

4

Due 12/4

Final Exam 12/11

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Reference paper: Silicon as a mechanical material

Reference Paper: Infinitesimal machinery

Lab Groups

 

 
 

Tuesday and Thursday 2-4pm, Grade: 30% HW, 30% Lab, 20% Exam, 20% Attendance. Labwork and HW due one week from assignment.

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Thomas Bifano, Director, Boston University Photonics Center

Room 936, 8 Saint Mary's Street, Boston, MA 02215

Tele: 617-353-8899, Email: tgb@bu.edu, Web: bifano.bu.edu

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