BOSTON UNIVERSITY
Mechanical Engineering
 
EK131/2 Introduction to Engineering: Micromachines
 

Many manmade devices for sensing and manipulating small objects are made using processes known collectively as micromachining, and the devices so-produced are micromachines. Air-bag crash sensors, tiny cell phone switches, inkjet printer heads are examples of such micromachines. In this course, the engineering challenges and physical principles behind micromachines will be explored in detail. Precision fabrication processes will be used in the lab to generate working micrometer-scale devices. Hands-on laboratory exercises in the Photonics Center's Precision Engineering Research Laboratory will include design, manufacture, and use of microscale systems.

Reference: M. Madou Fundamentals of Microfabrication, 2nd Ed.,CRC Press, ISBN: 0849308267

Location: PHOTONICS 901    
Days / Times T/R 2-4,  

Instructor Professor Bifano, copy all email to Ani Chaghatzbanian

Syllabus/Schedule/Grading Lab Groups  
T. Bifano Homepage    
     
Reference on silicon    
     
     
HOMEWORK
 

 

 

1 Due 9/9  

 

 

2 Due 9/18  
3 Due 9/25  
4 Due 10/9
     
 
 
   
Boston University Photonics Center, 8 Saint Mary's Street, Boston, MA 02215