Many manmade devices for sensing and manipulating small objects are made using processes known collectively as micromachining, and the devices so-produced are micromachines. Air-bag crash sensors, tiny cell phone switches, inkjet printer heads are examples of such micromachines. In this course, the engineering challenges and physical principles behind micromachines will be explored in detail. Precision fabrication processes will be used in the lab to generate working micrometer-scale devices. Hands-on laboratory exercises in the Photonics Center's Precision Engineering Research Laboratory will include design, manufacture, and use of microscale systems.

Reference: M. Madou Fundamentals of Microfabrication, 2nd Ed.,CRC Press, ISBN: 0849308267